A new precise positioning method for piezoelectric scanner of AFM.
AFM
Dynamic polynomial fitting
Hysteresis
Positioning accuracy
Journal
Ultramicroscopy
ISSN: 1879-2723
Titre abrégé: Ultramicroscopy
Pays: Netherlands
ID NLM: 7513702
Informations de publication
Date de publication:
01 2019
01 2019
Historique:
received:
22
05
2018
revised:
18
09
2018
accepted:
20
09
2018
pubmed:
6
10
2018
medline:
6
10
2018
entrez:
6
10
2018
Statut:
ppublish
Résumé
Atomic Force Microscopy (AFM) plays a vital role in nanoscience and nanotechnology due to its nanoscale resolution. However, the realization of highly precise measurement for AFM is still a challenge. A main factor is the positioning accuracy of the piezoelectric scanner (PZT), affected significantly by the hysteresis of PZT. The paper reports a new dynamic polynomial fitting method modeling hysteresis to achieve the inverse model of the PZT. The inverse model is used as the feedforward input, combined with the fuzzy feedback controller proposed in our former paper, to correct the nonlinear errors induced by the hysteresis. The method is demonstrated to be effective in improving the positioning accuracy of the lateral PZT. Its accuracy can achieve 1 nm.
Identifiants
pubmed: 30290329
pii: S0304-3991(18)30131-1
doi: 10.1016/j.ultramic.2018.09.016
pii:
doi:
Types de publication
Journal Article
Research Support, Non-U.S. Gov't
Langues
eng
Pagination
67-73Informations de copyright
Copyright © 2018 Elsevier B.V. All rights reserved.