Micromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging: design, microfabrication and experimental validation.
Journal
Biomedical optics express
ISSN: 2156-7085
Titre abrégé: Biomed Opt Express
Pays: United States
ID NLM: 101540630
Informations de publication
Date de publication:
01 Mar 2019
01 Mar 2019
Historique:
received:
04
01
2019
revised:
24
01
2019
accepted:
24
01
2019
entrez:
21
3
2019
pubmed:
21
3
2019
medline:
21
3
2019
Statut:
epublish
Résumé
OCT instruments permit fast and non-invasive 3D optical biopsies of biological tissues. However, they are bulky and expensive, making them only affordable at the hospital and thus, not sufficiently used as an early diagnostic tool. Significant reduction of system cost and size is achieved by implementation of MOEMS technologies. We propose an active array of 4x4 Mirau microinterferometers where the reference micro-mirrors are carried by a vertical comb-drive microactuator, enabling the implementation of the phase-shifting technique that improves the sensitivity and eliminates unwanted interferometric terms. We focus on the design of the imaging system, the microfabrication and the assembly of the Mirau microinterferometer, and the swept-source OCT imaging.
Identifiants
pubmed: 30891333
doi: 10.1364/BOE.10.001111
pii: 356665
pmc: PMC6420266
doi:
Types de publication
Journal Article
Langues
eng
Pagination
1111-1125Déclaration de conflit d'intérêts
The authors declare that there are no conflicts of interest related to this article.
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