Rapid, high-quality microfabrication of thermoset polymer PDMS using laser-induced bubbles.

Bubbles can be formed by focusing a high-power laser in a liquid. Based on this phenomenon, the present study demonstrated a novel technique, referred to as microFabrication using Laser-Induced Bubbles (microFLIB), for the microfabrication of the thermoset polymer polydimethylsiloxane (PDMS). A conventional nanosecond green laser was focused at the interface between uncured PDMS and a metal target and scanned to generate a line of bubbles at the boundary. The hemispherical shapes of these bubbles produced a groove on the rear side of the PDMS substrate following subsequent thermal curing. After the fabrication of such specimens, metal films could be selectively deposited along the grooves by electroless plating. This process allows rapid, high-quality microfluidic fabrication with potential applications to biochips.