Lift-Off Assisted Patterning of Few Layers Graphene.
2D materials
Pt
chemical vapor deposition (CVD)
graphene
patterning
Journal
Micromachines
ISSN: 2072-666X
Titre abrégé: Micromachines (Basel)
Pays: Switzerland
ID NLM: 101640903
Informations de publication
Date de publication:
25 Jun 2019
25 Jun 2019
Historique:
received:
29
05
2019
revised:
20
06
2019
accepted:
21
06
2019
entrez:
28
6
2019
pubmed:
28
6
2019
medline:
28
6
2019
Statut:
epublish
Résumé
Graphene and 2D materials have been exploited in a growing number of applications and the quality of the deposited layer has been found to be a critical issue for the functionality of the developed devices. Particularly, Chemical Vapor Deposition (CVD) of high quality graphene should be preserved without defects also in the subsequent processes of transferring and patterning. In this work, a lift-off assisted patterning process of Few Layer Graphene (FLG) has been developed to obtain a significant simplification of the whole transferring method and a conformal growth on micrometre size features. The process is based on the lift-off of the catalyst seed layer prior to the FLG deposition. Starting from a SiO
Identifiants
pubmed: 31242653
pii: mi10060426
doi: 10.3390/mi10060426
pmc: PMC6631601
pii:
doi:
Types de publication
Journal Article
Langues
eng
Références
Nat Nanotechnol. 2013 Apr;8(4):235-46
pubmed: 23552117
Electrophoresis. 2015 Aug;36(16):1886-93
pubmed: 25884327
Nature. 2014 Jan 9;505(7482):190-4
pubmed: 24336218
Sci Rep. 2012;2:682
pubmed: 23002423
Biomatter. 2014;4:
pubmed: 24743057
Acc Chem Res. 2013 Oct 15;46(10):2329-39
pubmed: 23480816
Nano Lett. 2010 May 12;10(5):1542-8
pubmed: 20361753
Nano Lett. 2010 Feb 10;10(2):490-3
pubmed: 20044841
Nano Lett. 2014 Dec 10;14(12):7145-52
pubmed: 25375666
Nanotechnology. 2016 Sep 23;27(38):385503
pubmed: 27532770
Nanoscale. 2012 Jan 21;4(2):438-40
pubmed: 22147241
Nanoscale. 2012 Aug 21;4(16):4883-99
pubmed: 22772581
Nanoscale Res Lett. 2011 Oct 26;6:565
pubmed: 22029707
Nat Commun. 2012 Feb 28;3:699
pubmed: 22426220
Nat Nanotechnol. 2013 May;8(5):356-62
pubmed: 23624698
J Vis Exp. 2013 Mar 01;(73):e50276
pubmed: 23486380
Adv Mater. 2013 Mar 13;25(10):1440-4
pubmed: 23280635
Biochim Biophys Acta. 2013 Sep;1830(9):4374-80
pubmed: 23295972
Sensors (Basel). 2016 Dec 30;17(1):
pubmed: 28042839
ACS Nano. 2013 Aug 27;7(8):6575-82
pubmed: 23869700