Multi-scale investigation in the frequency domain of Ar/HMDSO dusty plasma with pulsed injection of HMDSO.
Journal
Plasma sources science & technology
ISSN: 0963-0252
Titre abrégé: Plasma Sources Sci Technol
Pays: England
ID NLM: 101649113
Informations de publication
Date de publication:
01 Jul 2019
01 Jul 2019
Historique:
entrez:
23
7
2019
pubmed:
23
7
2019
medline:
23
7
2019
Statut:
ppublish
Résumé
A combination of time-resolved optical emission spectroscopy measurements and collisional-radiative modeling is used to investigate the phenomena occurring over multiple time scales in the frequency domain of a low-pressure, axially-asymmetric capacitively-coupled RF argon plasma with pulsed injection of hexamethyldisiloxane (HMDSO, Si
Identifiants
pubmed: 31327895
doi: 10.1088/1361-6595/ab07cc
pmc: PMC6640068
mid: EMS83575
pii:
doi:
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : European Research Council
ID : 610256
Pays : International
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