Controlled Spacing between Nanopatterned Regions in Block Copolymer Films Obtained by Utilizing Substrate Topography for Local Film Thickness Differentiation.
block copolymer
directed self-assembly
thin film
Journal
ACS applied materials & interfaces
ISSN: 1944-8252
Titre abrégé: ACS Appl Mater Interfaces
Pays: United States
ID NLM: 101504991
Informations de publication
Date de publication:
25 Sep 2019
25 Sep 2019
Historique:
pubmed:
5
9
2019
medline:
5
9
2019
entrez:
5
9
2019
Statut:
ppublish
Résumé
Various types of devices require hierarchically nanopatterned substrates, where the spacing between patterned domains is controlled. Ultraconfined films exhibit extreme morphological sensitivity to slight variations in film thickness when the substrate is highly selective toward one of the blocks. Here, it is shown that using the substrate's topography as a thickness differentiating tool enables the creation of domains with different surface patterns in a fully controlled fashion from a single, unblended block copolymer. This approach is applicable to block copolymers of different compositions and to different topographical patterns and thus opens numerous possibilities for the hierarchical construction of multifunctional devices.
Identifiants
pubmed: 31482698
doi: 10.1021/acsami.9b12817
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM