Selective Wet Etching of Silicon Germanium in Composite Vertical Nanowires.

chemical etching in situ TEM nanofabrication nanowire silicon germanium

Journal

ACS applied materials & interfaces
ISSN: 1944-8252
Titre abrégé: ACS Appl Mater Interfaces
Pays: United States
ID NLM: 101504991

Informations de publication

Date de publication:
09 Oct 2019
Historique:
pubmed: 17 9 2019
medline: 17 9 2019
entrez: 17 9 2019
Statut: ppublish

Résumé

Silicon germanium (Si

Identifiants

DOI: 10.1021/acsami.9b11934 PMID: 31525293
pubmed: 31525293
doi: 10.1021/acsami.9b11934
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

36839-36846

Auteurs

Zhaslan Baraissov (Z)

Department of Physics , National University of Singapore , Singapore 117551 , Singapore.
Centre for BioImaging Sciences, Department of Biological Sciences , National University of Singapore , Singapore 117557 , Singapore.
ORCID: 0000-0002-2018-982X

Antoine Pacco (A)

imec , Kapeldreef 75 , Leuven B-3001 , Belgium.

Siddardha Koneti (S)

Department of Physics , National University of Singapore , Singapore 117551 , Singapore.
Centre for BioImaging Sciences, Department of Biological Sciences , National University of Singapore , Singapore 117557 , Singapore.

Geeta Bisht (G)

Department of Physics , National University of Singapore , Singapore 117551 , Singapore.
Centre for BioImaging Sciences, Department of Biological Sciences , National University of Singapore , Singapore 117557 , Singapore.

Federico Panciera (F)

Department of Physics , National University of Singapore , Singapore 117551 , Singapore.
Centre for BioImaging Sciences, Department of Biological Sciences , National University of Singapore , Singapore 117557 , Singapore.

Frank Holsteyns (F)

imec , Kapeldreef 75 , Leuven B-3001 , Belgium.

Utkur Mirsaidov (U)

Department of Physics , National University of Singapore , Singapore 117551 , Singapore.
Centre for BioImaging Sciences, Department of Biological Sciences , National University of Singapore , Singapore 117557 , Singapore.
Centre for Advanced 2D Materials and Graphene Research Centre , National University of Singapore , Singapore 117546 , Singapore.
Department of Materials Science and Engineering , National University of Singapore , Singapore 117575 , Singapore.
ORCID: 0000-0001-8673-466X

Classifications MeSH