Positive non-linear capacitance: the origin of the steep subthreshold-slope in ferroelectric FETs.


Journal

Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288

Informations de publication

Date de publication:
18 Oct 2019
Historique:
received: 11 06 2019
accepted: 26 09 2019
entrez: 20 10 2019
pubmed: 20 10 2019
medline: 20 10 2019
Statut: epublish

Résumé

We show that the non-linear positive capacitance (PC) of ferroelectrics (FE) can explain the steep subthreshold-slope (SS) observed in FE based MOSFETs and often attributed to the existence of a negative capacitance in FE capacitors. Physically attainable and unattainable regions of the S-shape curve used in the negative capacitance theory are investigated by self-consistently solving Landau-Khalatnikov and Maxwell equations and by experimental validation. Finally, the conditions for attaining a steep SS in FE based MOSFETs assuming only positive capacitances are discussed.

Identifiants

pubmed: 31628404
doi: 10.1038/s41598-019-51237-2
pii: 10.1038/s41598-019-51237-2
pmc: PMC6802213
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

14957

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Auteurs

Md Nur K Alam (MNK)

Interuniversity Microelectronics Centre (imec), 75 Kapeldreef, B-3001, Leuven, Belgium. md.nur.kutubul.alam@imec.be.
Department of Materials Engineering, K. U. Leuven, Kasteelpark Arenberg 44 - box 2450, 3001, Leuven, Belgium. md.nur.kutubul.alam@imec.be.

P Roussel (P)

Interuniversity Microelectronics Centre (imec), 75 Kapeldreef, B-3001, Leuven, Belgium.

M Heyns (M)

Interuniversity Microelectronics Centre (imec), 75 Kapeldreef, B-3001, Leuven, Belgium.
Department of Materials Engineering, K. U. Leuven, Kasteelpark Arenberg 44 - box 2450, 3001, Leuven, Belgium.

J Van Houdt (J)

Interuniversity Microelectronics Centre (imec), 75 Kapeldreef, B-3001, Leuven, Belgium.
ESAT, K. U. Leuven, Kasteelpark Arenberg 10 - box 2444, 3001, Leuven, Belgium.

Classifications MeSH