Towards standardisation of contact and contactless electrical measurements of CVD graphene at the macro-, micro- and nano-scale.
Journal
Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288
Informations de publication
Date de publication:
21 Feb 2020
21 Feb 2020
Historique:
received:
01
05
2019
accepted:
05
12
2019
entrez:
22
2
2020
pubmed:
23
2
2020
medline:
23
2
2020
Statut:
epublish
Résumé
Graphene has become the focus of extensive research efforts and it can now be produced in wafer-scale. For the development of next generation graphene-based electronic components, electrical characterization of graphene is imperative and requires the measurement of work function, sheet resistance, carrier concentration and mobility in both macro-, micro- and nano-scale. Moreover, commercial applications of graphene require fast and large-area mapping of electrical properties, rather than obtaining a single point value, which should be ideally achieved by a contactless measurement technique. We demonstrate a comprehensive methodology for measurements of the electrical properties of graphene that ranges from nano- to macro- scales, while balancing the acquisition time and maintaining the robust quality control and reproducibility between contact and contactless methods. The electrical characterisation is achieved by using a combination of techniques, including magneto-transport in the van der Pauw geometry, THz time-domain spectroscopy mapping and calibrated Kelvin probe force microscopy. The results exhibit excellent agreement between the different techniques. Moreover, we highlight the need for standardized electrical measurements in highly controlled environmental conditions and the application of appropriate weighting functions.
Identifiants
pubmed: 32081982
doi: 10.1038/s41598-020-59851-1
pii: 10.1038/s41598-020-59851-1
pmc: PMC7035257
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
3223Subventions
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : European Association of National Metrology Institutes
ID : 16NRM01 GRACE
Organisme : Horizon 2020 Framework Programme
ID : 785219
Organisme : Horizon 2020 Framework Programme
ID : 785219
Références
Ferrari, A. C. et al. Science and technology roadmap for graphene, related two-dimensional crystals, and hybrid systems. Nanoscale 7(11), 4598–4810 (2014).
doi: 10.1039/C4NR01600A
Li, X. et al. Large-area synthesis of high-quality and uniform graphene films on copper foils. Science 324(5932), 1312–1314 (2009).
doi: 10.1126/science.1171245
Mattevi, C., Kim, H. & Chhowalla, M. A review of chemical vapour deposition of graphene on copper. J. Mater. Chem. 21(10), 3324 (2011).
doi: 10.1039/C0JM02126A
Rosei, R. et al. Structure of graphitic carbon on Ni(111): A surface extended-energy-loss fine-structure study. Phys. Rev. B. 28(2), 1161–1164 (1983).
doi: 10.1103/PhysRevB.28.1161
Shikin, A. M., Prudnikova, G. V., Adamchuk, V. K., Moresco, F. & Rieder, K. H. Surface intercalation of gold underneath a graphite monolayer on Ni(111) studied by angle-resolved photoemission and high-resolution electron-energy-loss spectroscopy. Phys. Rev. B - Condens. Matter Mater. Phys. 62(19), 13202–13208 (2000).
doi: 10.1103/PhysRevB.62.13202
Varykhalov, A. et al. Electronic and Magnetic Properties of Quasifreestanding Graphene on Ni. Phys. Rev. Lett. 101(15), 157601, (Oct. 2008).
Sutter, P. W., Flege, J.-I. & Sutter, E. A. Epitaxial graphene on ruthenium. Nat. Mater. 7(5), 406–411 (May 2008).
Zi-Pu, H., Ogletree, D. F., Van Hove, M. A. & Somorjai, G. A. Leed theory for incommensurate overlayers: Application to graphite on Pt(111). Surf. Sci. 180(2–3), 433–459 (1987).
doi: 10.1016/0039-6028(87)90219-6
Preobrajenski, A. B., Ng, M. L., Vinogradov, A. S. & Mårtensson, N. Controlling graphene corrugation on lattice-mismatched substrates. Phys. Rev. B - Condens. Matter Mater. Phys. 78(7), 2–5 (2008).
doi: 10.1103/PhysRevB.78.073401
Kholin, N. A., Rut’kov, E. V. & Tontegode, A. Y. The nature of the adsorption bond between graphite islands and iridium surface. Surf. Sci. 139(1), 155–172 (1984).
doi: 10.1016/0039-6028(84)90014-1
Pletikosić, I. et al. Dirac Cones and Minigaps for Graphene on Ir(111). Phys. Rev. Lett. 102(5), 056808 (Feb. 2009).
Mortazavi Zanjani, S. M., Holt, M., Sadeghi, M. M., Rahimi, S. & Akinwande, D. 3D integrated monolayer graphene–Si CMOS RF gas sensor platform. npj 2D Mater. Appl. 1(1), 36 (2017).
doi: 10.1038/s41699-017-0036-0
Han, S.-J., Garcia, A. V., Oida, S., Jenkins, K. A. & Haensch, W. Graphene radio frequency receiver integrated circuit. Nat. Commun. 5, 1–6 (Jan. 2014).
Goossens, S. et al. Broadband image sensor array based on graphene-CMOS integration. Nat. Photonics 11(6), 366–371 (2017).
doi: 10.1038/nphoton.2017.75
Petersen, D. H., Hansen, O., Lin, R. & Nielsen, P. F. Micro-four-point probe Hall effect measurement method. J. Appl. Phys. 104(1) (2008).
Bøggild, P. et al. Mapping the electrical properties of large-area graphene, 2D Mater. 4(4), 042003 (Sep. 2017).
doi: 10.1088/2053-1583/aa8683
Hao, L. et al. Non-contact method for measurement of the microwave conductivity of graphene. Appl. Phys. Lett. 103(12), 123103 (2013).
doi: 10.1063/1.4821268
Shaforost, O. et al. Contact-free sheet resistance determination of large area graphene layers by an open dielectric loaded microwave cavity. J. Appl. Phys. 117(2) (2015).
doi: 10.1063/1.4903820
Cooke, D. G. et al. Transient terahertz conductivity in photoexcited silicon nanocrystal films. Phys. Rev. B - Condens. Matter Mater. Phys. 73(19), 1–4 (2006).
doi: 10.1103/PhysRevB.73.193311
Frenzel, A. J. et al. Observation of suppressed terahertz absorption in photoexcited graphene. Appl. Phys. Lett. 102(11) (2013).
doi: 10.1063/1.4795858
A. Cultrera, et al., Mapping the conductivity of graphene with Electrical Resistance Tomography, Scientific Reports, 9, 10655 (2019).
Ren, L. et al. Terahertz and infrared spectroscopy of gated large-area graphene. Nano Lett. 12(7), 3711–3715 (2012).
doi: 10.1021/nl301496r
Buron, J. D. et al. Graphene Conductance Uniformity Mapping. Nano Lett. 12(10), 5074–5081 (Oct. 2012).
doi: 10.1021/nl301551a
Melios, C. et al. Effects of humidity on the electronic properties of graphene prepared by chemical vapour deposition. Carbon N. Y. 103, 273–280 (2016).
doi: 10.1016/j.carbon.2016.03.018
Melios, C., Giusca, C. E., Panchal, V. & Kazakova, O. Water on graphene: review of recent progress. 2D Mater. 5(2), 022001 (Jan. 2018).
Chwang, R., Smith, B. J. & Crowell, C. R. Contact size effects on the van der Pauw method for resistivity and Hall coefficient measurement. Solid State Electron. 17(12), 1217–1227 (1974).
doi: 10.1016/0038-1101(74)90001-X
van der Pauw, L. J. A Method of Measuring the Resistivity and Hall Coefficient on Lamellae of Arbitrary Shape. Philips. Tech. Rev. 20(220–224) (1958).
van der Pauw, L. J. A Method of Measuring Specific Resistivity and Hall effect of Discs of Arbitrary Shape. Philips. Res. Reports 13(1), 1–11 (1958).
Mackenzie, D. M. A. et al. Quality assessment of terahertz time-domain spectroscopy transmission and reflection modes for graphene conductivity mapping. Opt. Express (2018).
Buron, J. D. et al. Electrically continuous graphene from single crystal copper verified by terahertz conductance spectroscopy and micro four-point probe. Nano Lett. (2014).
Tomaino, J. L. et al. Terahertz imaging and spectroscopy of large-area single-layer graphene. Opt. Express (2011).
Hibino, H. et al. Dependence of electronic properties of epitaxial few-layer graphene on the number of layers investigated by photoelectron emission microscopy. Phys. Rev. B. 79(12), 1–7 (Mar. 2009).
Melitz, W., Shen, J., Kummel, A. C. & Lee, S. Kelvin probe force microscopy and its application. Surf. Sci. Rep. 66(1), 1–27 (Jan. 2011).
Nonnenmacher, M., O’Boyle, M. P. & Wickramasinghe, H. K. Kelvin probe force microscopy. Appl. Phys. Lett. 58(25), 2921–2923 (1991).
doi: 10.1063/1.105227
Panchal, V., Pearce, R., Yakimova, R., Tzalenchuk, A. & Kazakova, O., Standardization of surface potential measurements of graphene domains. Sci. Rep. 3(2), 2597 (Sep. 2013).
Panchal, V. et al. Surface potential variations in epitaxial graphene devices investigated by Electrostatic Force Spectroscopy. In 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO), pp. 1–5 (2012).
Panchal, V., Giusca, C. E., Lartsev, A., Yakimova, R. & Kazakova, O. Local electric field screening in bi-layer graphene devices. Front. Phys., 2(February, 27–31 (2014).
Kazakova, O., Panchal, V. & Burnett, T. Epitaxial Graphene and Graphene-Based Devices Studied by Electrical Scanning Probe Microscopy. Crystals, 3(1), 191–233, (Mar 2013).
Ziegler, D. et al. Variations in the work function of doped single- and few-layer graphene assessed by Kelvin probe force microscopy and density functional theory. Phys. Rev. B. 83(23), 1–7 (Jun. 2011).
Melios, C. et al. Carrier type inversion in quasi-free standing graphene: studies of local electronic and structural properties. Sci. Rep. 5, 10505 (2015).
doi: 10.1038/srep10505
16NRM01 GRACE: Developing electrical characterisation methods for future graphene electronics” is a Joint Research Project of the European Metrology Programme for Innovation and Research (EMPIR). Project website http://empir.npl.co.uk/grace/
Panchal, V. et al. Confocal laser scanning microscopy for rapid optical characterization of graphene. Commun. Phys. 1(1), 83 (Dec. 2018).
Koon, D. W. Effect of contact size and placement, and of resistive inhomogeneities on van der Pauw measurements. Rev. Sci. Instrum. 60(2), 271–274 (Feb. 1989).
doi: 10.1063/1.1140422
Koon, D. W. & Knickerbocker, C. J. What do you measure when you measure resistivity?. Rev. Sci. Instrum. 63(1), 207–210 (Jan. 1992).
Koon, D. W. & Chan, W. K. Direct measurement of the resistivity weighting function. Rev. Sci. Instrum. (1998).
Koon, D. W., Wang, F., Petersen, D. H. & Hansen, O. Sensitivity of resistive and Hall measurements to local inhomogeneities: Finite-field, intensity, and area corrections. J. Appl. Phys. 116(13) (2014).
Koon, D. W., Heřmanová, M. & Náhlík, J. Electrical conductance sensitivity functions for square and circular cloverleaf van der Pauw geometries. Meas. Sci. Technol. 26, 115004 (2015).
doi: 10.1088/0957-0233/26/11/115004
Whelan, P. R. et al. Electrical Homogeneity Mapping of Epitaxial Graphene on Silicon Carbide. ACS Appl. Mater. Interfaces 10, 31641 (2018).
doi: 10.1021/acsami.8b11428