Anodic bonding of mid-infrared transparent germanate glasses for high pressure - high temperature microfluidic applications.
107 Glass and ceramic materials
204 Optics / Optical applications
208 Sensors and actuators
300 Processing / Synthesis and Recycling
505 Optical / Molecular spectroscopy
Germanate glass
anodic bonding
high pressure/high temperature
microfluidics
mid-infrared
Journal
Science and technology of advanced materials
ISSN: 1468-6996
Titre abrégé: Sci Technol Adv Mater
Pays: United States
ID NLM: 101614420
Informations de publication
Date de publication:
2020
2020
Historique:
received:
10
09
2019
revised:
25
11
2019
accepted:
07
12
2019
entrez:
22
2
2020
pubmed:
23
2
2020
medline:
23
2
2020
Statut:
epublish
Résumé
High pressure/high-temperature microreactors based on silicon-Pyrex® microfabrication technologies have attracted increasing interest in various applications providing optical access in high-pressure flow processes. However, they cannot be coupled to infrared spectroscopy due to the limited optical transparency (up to ~2.7 μm in the infrared region) of the Pyrex® glass substrate employed in the microreactor fabrication. To address this limitation, the alternative approach proposed in this work consists in replacing the Pyrex® glass in the microreactor by a mid-infrared transparent glass with thermal and mechanical properties as close as possible or even better to those of the Pyrex®, including its ability for silicon-wafers coupling by the anodic bonding process. Glasses based on germanate GeO
Identifiants
pubmed: 32082440
doi: 10.1080/14686996.2019.1702861
pii: 1702861
pmc: PMC7006688
doi:
Types de publication
Journal Article
Langues
eng
Pagination
11-24Informations de copyright
© 2020 The Author(s). Published by National Institute for Materials Science in partnership with Taylor & Francis Group.
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