Surface Initiated Polymer Thin Films for the Area Selective Deposition and Etching of Metal Oxides.
area selective deposition
atomic layer deposition
ring opening metathesis polymerization
self-assembly
surface initiated polymerization
vapor phase polymerization
Journal
ACS nano
ISSN: 1936-086X
Titre abrégé: ACS Nano
Pays: United States
ID NLM: 101313589
Informations de publication
Date de publication:
28 Apr 2020
28 Apr 2020
Historique:
pubmed:
14
3
2020
medline:
14
3
2020
entrez:
14
3
2020
Statut:
ppublish
Résumé
The area selective growth of polymers and their use as inhibiting layers for inorganic film depositions may provide a valuable self-aligned process for fabrication. Polynorbornene (PNB) thin films were grown from surface-bound initiators and show inhibitory properties against the atomic layer deposition (ALD) of ZnO and TiO
Identifiants
pubmed: 32167284
doi: 10.1021/acsnano.9b09637
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM