Ellipsometric modeling of serially bi-deposited glancing-angle-deposition coatings.

Journal

Applied optics
ISSN: 1539-4522
Titre abrégé: Appl Opt
Pays: United States
ID NLM: 0247660

Informations de publication

Date de publication:
10 Feb 2020
Historique:
entrez: 1 4 2020
pubmed: 1 4 2020
medline: 1 4 2020
Statut: ppublish

Résumé

Ellipsometric modeling of serially bi-deposited glancing-angle-deposition (GLAD) coatings with a high degree of accuracy is imperative for multilayer coatings. High-precision dispersion curves are demonstrated for a wide variety of applications.

Identifiants

DOI: 10.1364/AO.59.000A26 PMID: 32225349
pubmed: 32225349
pii: 423396
doi: 10.1364/AO.59.000A26
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

A26-A30

Auteurs

C Smith (C)

S MacNally (S)

J B Oliver (JB)

Classifications MeSH