Adapting the Electron Beam from SEM as a Quantitative Heating Source for Nanoscale Thermal Metrology.
CASINO
e-beam
quantitative analysis
silicon nitride
thermal conductivity
Journal
Nano letters
ISSN: 1530-6992
Titre abrégé: Nano Lett
Pays: United States
ID NLM: 101088070
Informations de publication
Date de publication:
13 May 2020
13 May 2020
Historique:
pubmed:
9
4
2020
medline:
9
4
2020
entrez:
9
4
2020
Statut:
ppublish
Résumé
The electron beam (e-beam) in the scanning electron microscopy (SEM) provides an appealing mobile heating source for thermal metrology with spatial resolution of ∼1 nm, but the lack of systematic quantification of the e-beam heating power limits such application development. Here, we systemically study e-beam heating in LPCVD silicon nitride (SiN
Identifiants
pubmed: 32267709
doi: 10.1021/acs.nanolett.9b04940
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM