Lifetime and Stability of Silicon Nitride Nanopores and Nanopore Arrays for Ionic Measurements.
electron beam lithography
electron energy loss spectroscopy
nanopore array
nanoporous membranes
silicon nitride
solid-state nanopore
Journal
ACS nano
ISSN: 1936-086X
Titre abrégé: ACS Nano
Pays: United States
ID NLM: 101313589
Informations de publication
Date de publication:
23 06 2020
23 06 2020
Historique:
pubmed:
11
4
2020
medline:
15
5
2021
entrez:
11
4
2020
Statut:
ppublish
Résumé
Nanopores are promising for many applications including DNA sequencing and molecular filtration. Solid-state nanopores are preferable over their biological counterparts for applications requiring durability and operation under a wider range of external parameters, yet few studies have focused on optimizing their robustness. We report the lifetime and durability of pores and porous arrays in 10 to 100 nm-thick, low-stress silicon nitride (SiN
Identifiants
pubmed: 32275381
doi: 10.1021/acsnano.9b09964
pmc: PMC9547353
mid: NIHMS1834836
doi:
Substances chimiques
Ions
0
Silicon Compounds
0
Silicon Dioxide
7631-86-9
silicon nitride
QHB8T06IDK
Types de publication
Journal Article
Research Support, N.I.H., Extramural
Research Support, U.S. Gov't, Non-P.H.S.
Langues
eng
Sous-ensembles de citation
IM
Pagination
6715-6728Subventions
Organisme : NHGRI NIH HHS
ID : R01 HG009189
Pays : United States
Organisme : NHGRI NIH HHS
ID : R01 HG012413
Pays : United States
Organisme : NHGRI NIH HHS
ID : R21 HG010536
Pays : United States
Références
ACS Nano. 2020 Feb 25;14(2):1338-1349
pubmed: 32049492
Nanoscale. 2012 Mar 7;4(5):1572-6
pubmed: 22314312
ACS Nano. 2017 Feb 28;11(2):1937-1945
pubmed: 28125779
Trends Biotechnol. 2000 Apr;18(4):147-51
pubmed: 10740260
Nat Nanotechnol. 2010 Nov;5(11):807-14
pubmed: 20972437
J Vis Exp. 2011 Dec 02;(58):
pubmed: 22157952
ACS Nano. 2015 Jun 23;9(6):6555-64
pubmed: 26035079
Nat Nanotechnol. 2007 Apr;2(4):209-15
pubmed: 18654264
Adv Mater. 2018 Oct;30(42):e1704680
pubmed: 30260506
Science. 1967 Mar 17;155(3768):1404-5
pubmed: 17839610
Membranes (Basel). 2018 Jun 02;8(2):
pubmed: 29865242
Nano Lett. 2014 Dec 10;14(12):6917-25
pubmed: 25347403
J Phys Condens Matter. 2016 Mar 9;28(9):094014
pubmed: 26870908
Nano Lett. 2010 Aug 11;10(8):2915-21
pubmed: 20698604
Nat Nanotechnol. 2013 Dec;8(12):946-51
pubmed: 24185943
Nanotechnology. 2010 Mar 19;21(11):115304
pubmed: 20173233
Nat Mater. 2003 Sep;2(9):611-5
pubmed: 12942073
ACS Nano. 2018 Dec 26;12(12):12472-12481
pubmed: 30457833
Nat Mater. 2003 Aug;2(8):537-40
pubmed: 12858166
ACS Nano. 2013 May 28;7(5):4629-36
pubmed: 23621759
Nanotechnology. 2018 Apr 6;29(14):145302
pubmed: 29384130
Nat Nanotechnol. 2009 Apr;4(4):265-70
pubmed: 19350039
Adv Funct Mater. 2010 Apr 23;20(8):1266-1275
pubmed: 23335871
Sci Rep. 2018 Jun 27;8(1):9765
pubmed: 29950607
Sci Rep. 2019 Dec 9;9(1):18663
pubmed: 31819125
Nano Lett. 2017 Nov 8;17(11):7067-7074
pubmed: 28975798
Electrophoresis. 2012 Dec;33(23):3488-96
pubmed: 23161707
Nano Lett. 2009 Jan;9(1):479-84
pubmed: 19143508
Annu Rev Anal Chem (Palo Alto Calif). 2008;1:737-66
pubmed: 20636096
Nanotechnology. 2011 Aug 5;22(31):315101
pubmed: 21730759
PLoS One. 2014 Mar 21;9(3):e92880
pubmed: 24658537
Nat Biotechnol. 2015 Oct;33(10):1087-91
pubmed: 26352647
ACS Nano. 2013 Dec 23;7(12):11283-9
pubmed: 24224888
ACS Nano. 2019 Sep 24;13(9):10545-10554
pubmed: 31449393
Nat Biotechnol. 2001 Jul;19(7):636-9
pubmed: 11433274
Nano Lett. 2007 Jun;7(6):1580-5
pubmed: 17503868
Nature. 2001 Jul 12;412(6843):166-9
pubmed: 11449268