MEMS Mirrors for LiDAR: A review.
LiDAR
laser scanning
mems mirror
micromirror
optical scanner
Journal
Micromachines
ISSN: 2072-666X
Titre abrégé: Micromachines (Basel)
Pays: Switzerland
ID NLM: 101640903
Informations de publication
Date de publication:
27 Apr 2020
27 Apr 2020
Historique:
received:
02
04
2020
revised:
23
04
2020
accepted:
23
04
2020
entrez:
1
5
2020
pubmed:
1
5
2020
medline:
1
5
2020
Statut:
epublish
Résumé
In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other types of laser scanners, making them ideal for LiDAR in a wide range of applications. A figure of merit (FoM) is defined for MEMS mirrors in LiDAR scanners in terms of aperture size, field of view (FoV) and resonant frequency. Various MEMS mirrors based on different actuation mechanisms are compared using the FoM. Finally, a preliminary assessment of off-the-shelf MEMS scanned LiDAR systems is given.
Identifiants
pubmed: 32349453
pii: mi11050456
doi: 10.3390/mi11050456
pmc: PMC7281653
pii:
doi:
Types de publication
Journal Article
Review
Langues
eng
Subventions
Organisme : Office of Academic Research, U.S. Naval Academy
ID : N00014-18-1-2663
Organisme : NSF MIST
ID : N/A
Organisme : University of Florida Foundation
ID : N/A
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