Near-Infrared Laser-Annealed IZO Flexible Device as a Sensitive H
IZO
NIR
flexible
gas sensor
laser annealing
sol−gel
Journal
ACS applied materials & interfaces
ISSN: 1944-8252
Titre abrégé: ACS Appl Mater Interfaces
Pays: United States
ID NLM: 101504991
Informations de publication
Date de publication:
03 Jun 2020
03 Jun 2020
Historique:
pubmed:
6
5
2020
medline:
6
5
2020
entrez:
6
5
2020
Statut:
ppublish
Résumé
A metal-oxide material (indium zinc oxide [IZO]) device with near-infrared (NIR) laser annealing was demonstrated on both glass and bendable plastic substrates (polycarbonate, polyethylene, and polyethylene terephthalate). After only 60 s, the sheet resistance of IZO films annealed with a laser was comparable to that of thermal-annealed devices at temperatures in the range of 200-300 °C (1 h). XPS, ATR, and AFM were used to investigate the changes in the sheet resistance and correlate them to the composition and morphology of the thin film. Finally, the NIR-laser-annealed IZO films were demonstrated to be capable of detecting changes in humidity and serving as a highly sensitive gas sensor of hydrogen sulfide (in ppb concentration), with room-temperature operation on a bendable substrate.
Identifiants
pubmed: 32367710
doi: 10.1021/acsami.0c03257
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM