Coupled Broad Ion Beam-Scanning Electron Microscopy (BIB-SEM) for polishing and three dimensional (3D) serial section tomography (SST).


Journal

Ultramicroscopy
ISSN: 1879-2723
Titre abrégé: Ultramicroscopy
Pays: Netherlands
ID NLM: 7513702

Informations de publication

Date de publication:
07 2020
Historique:
received: 11 06 2019
revised: 13 03 2020
accepted: 28 03 2020
pubmed: 18 5 2020
medline: 8 7 2021
entrez: 17 5 2020
Statut: ppublish

Résumé

Here we describe the first automated fully integrated in-microscope broad ion beam (BIB) system. Ar

Identifiants

pubmed: 32416435
pii: S0304-3991(19)30209-8
doi: 10.1016/j.ultramic.2020.112989
pii:
doi:

Substances chimiques

Ions 0

Types de publication

Journal Article Research Support, Non-U.S. Gov't

Langues

eng

Sous-ensembles de citation

IM

Pagination

112989

Informations de copyright

Copyright © 2020 The Authors. Published by Elsevier B.V. All rights reserved.

Déclaration de conflit d'intérêts

Declaration of Competing Interest None.

Auteurs

Ali Gholinia (A)

The Henry Royce Institute, Department of Materials, University of Manchester, M13 9PL, United Kingdom. Electronic address: ali.gholinia@manchester.ac.uk.

Matthew E Curd (ME)

The Henry Royce Institute, Department of Materials, University of Manchester, M13 9PL, United Kingdom.

Etienne Bousser (E)

Functional Coating and Surface Engineering Laboratory, Department of Engineering Physics, Polytechnique Montréal, Canada.

Kevin Taylor (K)

Department of Earth and Environmental Sciences, University of Manchester, Oxford Road, Manchester, M13 9PL, United Kingdom.

Thijs Hosman (T)

Gatan Inc., Pleasanton, CA 94588, United States.

Steven Coyle (S)

Gatan Inc., Pleasanton, CA 94588, United States.

Michael Hassel Shearer (MH)

Gatan Inc., Pleasanton, CA 94588, United States.

John Hunt (J)

Gatan Inc., Pleasanton, CA 94588, United States.

Philip J Withers (PJ)

The Henry Royce Institute, Department of Materials, University of Manchester, M13 9PL, United Kingdom.

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Classifications MeSH