Flexible and Epitaxial Metal Oxide Thin Film Growth by Photoreaction Processing for Electrical and Optical Applications.
UV laser
crystal growth
epitaxy
flexible
metal oxide
thin films
Journal
Chemistry (Weinheim an der Bergstrasse, Germany)
ISSN: 1521-3765
Titre abrégé: Chemistry
Pays: Germany
ID NLM: 9513783
Informations de publication
Date de publication:
27 Jul 2020
27 Jul 2020
Historique:
received:
31
12
2019
pubmed:
20
5
2020
medline:
20
5
2020
entrez:
20
5
2020
Statut:
ppublish
Résumé
This review summarizes the use of photoreactions that replace conventional heating processes for growing oxide thin films from chemical solutions. In particular, this review outlines key variables in photoreactions that affect epitaxial and polycrystalline thin film growth, including precursor materials, laser wavelength, laser fluence, and carbon. In addition, the features of the photoreaction process that can be controlled at a low temperature by oxygen non-stoichiometry are examined. Likewise, functions that are neither achieved by developing a gradient structure nor controlled by a thermal equilibrium reaction are detailed. Two new concepts are presented, known as photoreaction of nanoparticles (PRNP) and photoreaction of a hybrid solutions (PRHS), in which crystal nuclei are pre-dispersed in a metal-organic compound film. This method has successfully produced flexible phosphor films used as resistor or thermistor electronic components. Finally, thin film growth using different light sources such as flash lamps and femtosecond lasers (fs) is explored.
Identifiants
pubmed: 32427365
doi: 10.1002/chem.201905879
doi:
Types de publication
Journal Article
Review
Langues
eng
Sous-ensembles de citation
IM
Pagination
9261-9276Informations de copyright
© 2020 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.
Références
M. L. Calzada, I. Bretos, R. Jiménez, H. Guillon, L. Pardo, Adv. Mater. 2004, 16, 1620.
M. Minakata, Y. Furukawa, J. Electron. Mater. 1986, 15, 159.
A. Watanabe, Y. Imai, Thin Solid Films 1999, 348, 63.
A. Watanabe, T. Tsuchiya, Y. Imai, Jpn. J. Appl. Phys. 2001, 40, 4051.
A. Watanabe, T. Tsuchiya, Y. Imai, Thin Solid Films 2002, 406, 132.
A. Watanabe, T. Tsuchiya, Y. Imai, Thin Solid Films 2002, 419, 76.
S. S. N. Bharadwaja, J. Kulik, R. Akarapu, H. Beratan, S. Trolier-McKinstry, IEEE Trans. Ferro. Freq. Cont. 2010, 57, 2182-2191.
A. Rajashekhar, H.-R. Zhang, B. Srowthi, I. M. Reaney, S. Trolier-McKinstry, G. Brennecka, J. Am. Ceram. Soc. 2016, 99, 43-50.
A. Rajashekhar, A. Fox, S. S. N. Bharadwaja, S. Trolier-McKinstry, Appl. Phys. Lett. 2013, 103, 032908.
H. Imai, A. Tominaga, H. Hirashima, M. Toki, M. Aizawa, J. Sol-Gel Sci. Technol. 1998, 13, 991.
T. Tsuchiya, A. Watanabe, H. Niino, I. Yamaguchi, T. Manabe, T. Kumagai, S. Mizuta, Appl. Surf. Sci. 2002, 186, 173.
T. Tsuchiya, A. Watanabe, Y. Imai, H. Niino, I. Yamaguchi, T. Manabe, T. Kumagai, S. Mizuta, Jpn. J. Appl. Phys. 1999, 38, L823.
T. Nakajima, T. Tsuchiya, M. Ichihara, H. Nagai, T. Kumagai, Chem. Mater. 2008, 20, 7344.
H. Palneedi, J. H. Park, D. Maurya, M. Peddigari, G.-T. Hwang, V. Annapureddy, J.-W. Kim, J.-J. Choi, B.-D. Hahn, S. Priya, K. J. Lee, J. Ryu, Adv. Mater. 2018, 30, 1705148.
I. Bretos, R. Jimenez, J. Ricote, M. L. Calzada, Chem. Soc. Rev. 2018, 47, 291-308.
T. Nakajima, K. Shinoda, T. Tsuchiya, Chem. Soc. Rev. 2014, 43, 2027-2041.
K. Daoudi, T. Tsuchiya, T. Kumagai, Appl. Phys. A 2007, 88, 639.
T. Nakajima, T. Tsuchiya, M. Ichihara, H. Nagai, T. Kumagai, Appl. Phys. Express 2009, 2, 023001-023001.
T. Tsuchiya, F. Yamaguchi, I. Morimoto, T. Nakajima, T. Kumagai, Appl. Phys. A 2010, 99, 745.
P. C. With, U. Helmstedt, S. Naumov, A. Sobottka, A. Prager, U. Decker, R. Heller, B. Abel, L. Prager, Chem. Mater. 2016, 28, 7715.
T. Tsuchiya, A. Watanabe, Y. Imai, H. Niino, I. Yamaguchi, T. Manabe, T. Kumagai, S. Mizuta, Jpn. J. Appl. Phys. 1999, 38, L1112.
T. Tsuchiya, H. Niino, A. Yabe, I. Yamaguchi, T. Manabe, T. Kumagai, S. Mizuta, Appl. Surf. Sci. 2002, 197-198, 512.
T. Tsuchiya, A. Watanabe, Y. Imai, H. Niino, I. Yamaguchi, T. Manabe, T. Kumagai, S. Mizuta, Jpn. J. Appl. Phys. 2000, 39, L866.
T. Tsuchiya, A. Watanabe, T. Nakajima, T. Kumagai, Appl. Phys. A 2010, 101, 681.
T. Nakajima, T. Tsuchiya, T. Kumagai, Curr. Appl. Phys. 2008, 8, 404.
T. Nakajima, T. Tsuchiya, T. Kumagai, Appl. Surf. Sci. 2007, 254, 884.
T. Nakajima, K. Shinoda, T. Tsuchiya, Phys. Chem. Chem. Phys. 2013, 15, 14384.
T. Tsuchiya, T. Yoshitake, Y. Shimakawa, I. Yamaguchi, T. Manabe, T. Kumagai, Y. Kubo, S. Mizuta, Jpn. J. Appl. Phys. 2003, 42, L956.
T. Tsuchiya, T. Yoshitake, Y. Shimakawa, I. Yamaguchi, T. Manabe, T. Kumagai, Y. Kubo, S. Mizuta, J. Photochem. Photobiol. A, Chem. 2004, 166, 123.
T. Tsuchiya, T. Nakajima, T. Kumagai, Appl. Surf. Sci. 2007, 253, 6504.
T. Tsuchiya, T. Nakajima, K. Daoudi, T. Kumagai, Mater. Sci. Eng. B 2007, 144, 89.
T. Tsuchiya, T. Nakajima, T. Kumagai, Appl. Surf. Sci. 2009, 255, 9804.
A. Goyal, M. Rajeswari, R. Shreekala, S. E. Lofland, S. M. Bhagat, T. Boettcher, C. Kwon, R. Ramesh, T. Venkatesan, Appl. Phys. Lett. 1997, 71, 2535.
T. Tsuchiya, I. Yamaguchi, T. Manabe, T. Kumagai, S. Mizuta, Mater. Sci. Semicond. Process. 2002, 5, 207.
T. Miyazaki, S. Sou, N. Sakamoto, N. Wakiya, H. Suzuki, J. Ceram. Soc. Jpn. 2009, 117, 950.
T. Nakajima, T. Tsuchiya, K. Daoudi, Y. Ueda, T. Kumagai, Mater. Sci. Eng. B 2007, 144, 104.
T. Tsuchiya, K. Daoudi, I. Yamaguchi, T. Manabe, T. Kumagai, S. Mizuta, Appl. Surf. Sci. 2005, 247, 145.
T. Tsuchiya, A. Watanabe, T. Kumagai, S. Mizuta, Appl. Surf. Sci. 2005, 248, 118.
T. Tsuchiya, F. Kato, T. Nakajima, K. Igarashi, T. Kumagai, Appl. Surf. Sci. 2009, 255, 9808.
M. Nishikawa, T. Nakajima, T. Kumagai, T. Okutani, T. Tsuchiya, Appl. Surf. Sci. 2011, 257, 2643.
A. Queraltó, A. Pérez del Pino, M. de la Mata, J. Arbiol, M. Tristany, X. Obradors, and T. Puig, Chem. Mater. 2016, 28, 6136.
A. Queraltó, M. de la Mata, J. Arbiol, X. Obradors, T. Puig, Adv. Mater. Interfaces 2016, 3, 1600392.
A. Queraltó, A. Pérez del Pino, M. de la Mata, J. Arbiol, M. Tristany, A. Gómez, X. Obradors, T. Puig, Appl. Phys. Lett. 2015, 106, 262903.
A. Queraltó, A. Pérez del Pino, M. de la Mata, M. Tristany, X. Obradors, T. Puig, S. Trolier-McKinstry, Ceramics Intern. 2016, 42, 4039.
A. Queraltó, A. Pérez del Pino, M. de la Mata, J. Arbiol, X. Obradors, T. Puig, Cryst. Growth Des. 2015, 15, 1957.
G. Bordelet, I. Yamaguchi, T. Manabe, T. Tsuchiya, Ceramics Intern. 2018, 44, S26.
I. Yamaguchi, T. Manabe, T. Tsuchiya, T. Nakajima, M. Sohma, T. Kumagai, J. Solid State Chem. 2002, 163, 239.
M. Nishikawa, T. Nakajima, T. Kumagai, T. Okutani, T. Tsuchiya, Appl. Phys. A 2010, 100, 297.
M. Nishikawa, T. Nakajima, T. Kumagai, T. Okutani, T. Tsuchiya, J. Ceram. Soc. Jpn. 2010, 118, 788.
M. Nishikawa, T. Nakajima, T. Kumagai, T. Okutani, T. Tsuchiya, Jpn. J. Appl. Phys. 2011, 50, 01BE04-1.
M. Nishikawa, T. Nakajima, T. Manabe, T. Okutani, T. Tsuchiya, Mater. Lett. 2010, 64, 1921.
Y. Muraoka, Z. Hiroi, Appl. Phys. Lett. 2002, 80, 583.
M. Nishikawa, T. Nakajima, T. Kumagai, T. Okutani, T. Tsuchiya, J. Ceram. Soc. Jpn. 2011, 119, 577.
L. N. Son, T. Tachiki, T. Uchida, Jpn. J. Appl. Phys. 2012, 51, 088004.
Z. Ding, Y. Cui, D. Wan, H. Luo, Y. Gao, RSC Adv. 2017, 7, 29496.
B. Guo, D. Wan, A. Ishaq, H. Luo, Y. Gao, J. Alloys Compd. 2017, 715, 129.
K. Miyazaki, K. Shibuya, M. Suzuki, A. Sawa, J. Appl. Phys. 2015, 118, 055301.
S. Choi, B.-J. Kim, Y.-W. Lee, S. J. Yun, H.-T. Kim, Jpn. J. Appl. Phys. 2008, 47, 3296.
M. Nishikawa, M. Fukuda, Y. Nakabayashi, N. Saito, N. Ogawa, T. Nakajima, K. Shinoda, T. Tsuchiya, Y. Nosaka, Appl. Surf. Sci. 2016, 363, 173.
M. Nishikawa, S. Yuto, T. Nakajima, T. Tsuchiya, N. Saito, Catal. Lett. 2017, 147, 292.
I. Bretos, R. Jiménez, A. Wu, A. I. Kingon, P. M. Vilarinho, M. L. Calzada, Adv. Mater. 2014, 26, 1405.
S. Halder, U. Boettger, T. Schneller, R. Waser, O. Baldus, P. Jacobs, M. Wehner, Mater. Sci. Eng. B 2006, 133, 235.
T. Nakajima, T. Kitamura, T. Tsuchiya, Appl. Catal. B 2011, 108-109, 47.
T. Nakajima, S. Hanawa, T. Tsuchiya, J. Mater. Chem. C 2019, 7, 5193.
T. Tsuchiya, T. Nakajima, T. Kumagai, WO2010047177.
T. Tsuchiya, K. Shinoda, T. Kumagai, WO2014119592.
T. Nakajima, M. Isobe, T. Tsuchiya, Y. Ueda, T. Kumagai, Nat. Mater. 2008, 7, 735.
T. Tsuchiya, J. Ceram. Soc. Jpn. 2018, 126, 889.
T. Nakajima, T. Tsuchiya, J. Mater. Chem. C 2015, 3, 3809.
T. Nakajima, S. Hanawa, T. Tsuchiya, J. Appl. Phys. 2017, 122, 135309.
M. Tomczyk, I. Bretos, R. Jimenez, A. Mahajan, E. Venkata Ramana, M. Lourdes Calzada, P. M. Vilarinho, J. Mater. Chem. C 2017, 5, 12529.
B. Bourgeois, S. Luo, B. Riggs, Y. Ji, S. Adireddy, K. Schroder, S. Farnsworth, D. Chrisey, M. Escarra, Nanotechnology 2018, 29, 315401.
S. Luo, S. Zhang, B. B. Bourgeois, B. C. Riggs, K. A. Schroder, Y. Zhang, J. He, S. Adireddy, K. Sun, J. T. Shipman, M. M. Oguntoye, V. Puli, W. Liu, R. Tu, L. Zhang, S. Farnsworth, D. B. Chrisey, J. Mater. Res. 2017, 32, 1701.
J.-W. Jo, K.-T. Kim, H.-H. Park, S. K. Park, J. Korean Phys. Soc. 2019, 74, 1052.
C. Chen, H. Yang, Q. Yang, G. Chen, H. Chen, T. Guo, J. Phys. D 2019, 52, 385105.
C. Chen, Q. Yang, G. Chen, H. Chen, T. Guo, IEEE Trans. Electron Devices 2019, 66, 4888.
L. Kotsedi, V. Furlan, V. Bharadwaj, K. Kaviyarasu, B. Sotillo, C. B. Mtshali, N. Matinise, A. G. Demir, B. Previtali, R. Ramponi, S. M. Eaton, M. Maaza, Opt. Mater. 2019, 95, 109206.
T. Tsuchiya, T. Matsuura, K. Shinoda, T. Nakajima, J. Akimoto, Y. Idemoto, Jpn. J. Appl. Phys. 2014, 53, 05FB14-1.
Y. Matsubayashi, J. Nomoto, I. Yamaguchi, D. Nishio-Hamane, T. Tsuchiya, Appl. Surf. Sci. 2020, 506, 144915.