Tilted black-Si: ∼0.45 form-birefringence from sub-wavelength needles.


Journal

Optics express
ISSN: 1094-4087
Titre abrégé: Opt Express
Pays: United States
ID NLM: 101137103

Informations de publication

Date de publication:
25 May 2020
Historique:
entrez: 19 6 2020
pubmed: 19 6 2020
medline: 19 6 2020
Statut: ppublish

Résumé

The self-organised conical needles produced by plasma etching of silicon (Si), known as black silicon (b-Si), create a form-birefringent surface texture when etching of Si orientated at angles of θ

Identifiants

pubmed: 32549433
pii: 431746
doi: 10.1364/OE.392646
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

16012-16026

Auteurs

Classifications MeSH