Monolithic Fabrication of NPN/SiN
bionanotechnology
biosensors
microelectromechanical systems
microfluidics
thin films
Journal
Advanced materials interfaces
ISSN: 2196-7350
Titre abrégé: Adv Mater Interfaces
Pays: Germany
ID NLM: 101633108
Informations de publication
Date de publication:
23 Jul 2019
23 Jul 2019
Historique:
entrez:
25
6
2020
pubmed:
25
6
2020
medline:
25
6
2020
Statut:
ppublish
Résumé
Nanoscale preconfinement of DNA has been shown to reduce the variation of passage times through solid-state nanopores. Preconfinement has been previously achieved by forming a femtoliter-sized cavity capped with a highly porous layer of nanoporous silicon nitride (NPN). This cavity was formed by sealing a NPN nanofilter membrane against a substrate chip using water vapor delamination. Ultimately, this method of fabrication cannot keep a consistent spacing between the filter and solid-state nanopore due to thermal fluctuations and wrinkles in the membrane, nor can it be fabricated on thousands of individual devices reliably. To overcome these issues, we present a method to fabricate the femtoliter cavity monolithically, using a selective XeF
Identifiants
pubmed: 32577337
doi: 10.1002/admi.201900684
pmc: PMC7310959
mid: NIHMS1033053
pii:
doi:
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : NIBIB NIH HHS
ID : R21 EB024120
Pays : United States
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