Effect of Ion Irradiation Introduced by Focused Ion-Beam Milling on the Mechanical Behaviour of Sub-Micron-Sized Samples.
Journal
Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288
Informations de publication
Date de publication:
25 Jun 2020
25 Jun 2020
Historique:
received:
20
03
2020
accepted:
19
05
2020
entrez:
27
6
2020
pubmed:
27
6
2020
medline:
27
6
2020
Statut:
epublish
Résumé
The development of xenon plasma focused ion-beam (Xe
Identifiants
pubmed: 32587335
doi: 10.1038/s41598-020-66564-y
pii: 10.1038/s41598-020-66564-y
pmc: PMC7316792
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
10324Références
Vijayan, S., Aindow, M., Jinschek, J. R., Kujawa, S. & Greiser, J. TEM Specimen Preparation for In Situ Heating Experiments Using FIB. Microsc. Microanal. 23, 294–295 (2017).
Jiang, Q. K. et al. The effect of size on the elastic strain limit in Ni60Nb 40 glassy films. Acta Mater. 61, 4689–4695 (2013).
Uchic, M. D., Dimiduk, D. M., Florando, J. N. & Nix, W. D. Sample dimensions influence strength and crystal plasticity. Science 305, 986–989 (2004).
pubmed: 15310897
Uchic, M. D., Shade, P. A. & Dimiduk, D. M. Plasticity of Micrometer-Scale Single Crystals in Compression. Annu. Rev. Mater. Res. 39, 361–386 (2009).
Bei, H., Shim, S., Miller, M. K., Pharr, G. M. & George, E. P. Effects of focused ion beam milling on the nanomechanical behavior of a molybdenum-alloy single crystal. Appl. Phys. Lett. 91, 1–4 (2007).
Kiener, D., Hosemann, P., Maloy, S. A. & Minor, A. M. In situ nanocompression testing of irradiated copper. Nat. Mater. 10, 608–613 (2011).
pubmed: 21706011
pmcid: 3145148
Wang, Y. B. et al. Super deformability and young’s modulus of gaas nanowires. Adv. Mater. 23, 1356–1360 (2011).
pubmed: 21400595
Lin, Q. et al. In-situ high-resolution transmission electron microscopy investigation of grain boundary dislocation activities in a nanocrystalline CrMnFeCoNi high-entropy alloy. J. Alloys Compd. 709, 802–807 (2017).
Chen, Y. et al. Determination of Youngs Modulus of Ultrathin Nanomaterials. Nano Lett. 15, 5279–5283 (2015).
pubmed: 26189461
Dehm, G. Miniaturized single-crystalline fcc metals deformed in tension: New insights in size-dependent plasticity. Prog. Mater. Sci. 54, 664–688 (2009).
Wang, L., Zhang, Z. & Han, X. In situ experimental mechanics of nanomaterials at the atomic scale. NPG Asia Mater. 5, e40 (2013).
Han, X. et al. Low-temperature in situ large-strain plasticity of silicon nanowires. Adv. Mater. 19, 2112–2118 (2007).
Wang, L. et al. In Situ observation of dislocation behavior in nanometer grains. Phys. Rev. Lett. 105, 1–4 (2010).
Zhou, H. et al. In-situ observation of dislocation dynamics near heterostructured interfaces. Mater. Res. Lett. 7, 376–382 (2019).
Sun, S. et al. Atomistic Mechanism of Stress-Induced Combined Slip and Diffusion in Sub-5 Nanometer-Sized Ag Nanowires. ACS Nano 13, 8708–8716 (2019).
pubmed: 31318525
Choi, W. S. et al. Dislocation interaction and twinning-induced plasticity in face-centered cubic Fe-Mn-C micro-pillars. Acta Mater. 132, 162–173 (2017).
Imrich, P. J., Kirchlechner, C., Kiener, D. & Dehm, G. In Situ TEM Microcompression of Single and Bicrystalline Samples: Insights and Limitations. Jom 67, 1704–1712 (2015).
Minor, A. M. & Dehm, G. Advances in in situ nanomechanical testing. MRS Bull. 44, 438–442 (2019).
Kiener, D., Motz, C. & Dehm, G. Micro-compression testing: A critical discussion of experimental constraints. Mater. Sci. Eng. A 505, 79–87 (2009).
Giannuzzi, L. & Smith, N. TEM Specimen Preparation with Plasma FIB Xe + Ions. Microsc. Microanal. 17, 646–647 (2011).
Young, R. J. & Moore, M. V. Dual-beam (FIB-SEM) systems techniques and automated applications. in Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice 247–268 (Springer US, 2005).
Volkert, C. A. & Minor, A. M. Focused Ion Beam Microscopy and Micromachining. MRS Bull. 32, 389–399 (2007).
Pekin, T. C., Allen, F. I. & Minor, A. M. Evaluation of neon focused ion beam milling for TEM sample preparation. J. Microsc. 264, 59–63 (2016).
pubmed: 27172066
Chen, Z. et al. Facilitation of Ferroelectric Switching via Mechanical Manipulation of Hierarchical Nanoscale Domain Structures. Phys. Rev. Lett. 118, 1–7 (2017).
Hasan, M. N. et al. Simultaneously enhancing strength and ductility of a high-entropy alloy via gradient hierarchical microstructures. Int. J. Plast. 123, 178–195 (2019).
Yu, Q. et al. The nanostructured origin of deformation twinning. Nano Lett. 12, 887–892 (2012).
pubmed: 22239446
Ernst, A., Wei, M. & Aindow, M. A Comparison of Ga FIB and Xe-Plasma FIB of Complex Al Alloys. Microsc. Microanal. 23, 288–289 (2017).
Burnett, T. L. et al. Large volume serial section tomography by Xe Plasma FIB dual beam microscopy. Ultramicroscopy 161, 119–129 (2016).
pubmed: 26683814
Xiao, Y., Maier-Kiener, V., Michler, J., Spolenak, R. & Wheeler, J. M. Deformation behavior of aluminum pillars produced by Xe and Ga focused ion beams: Insights from strain rate jump tests. Mater. Des. 181, 107914 (2019).
Kiener, D., Motz, C., Rester, M., Jenko, M. & Dehm, G. FIB damage of Cu and possible consequences for miniaturized mechanical tests. Mater. Sci. Eng. A 459, 262–272 (2007).
Wang, Y. C. et al. Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars. Small 13, 1601753 (2017).
Ding, M. S. et al. Radiation-Induced Helium Nanobubbles Enhance Ductility in Submicron-Sized Single-Crystalline Copper. Nano Lett. 16, 4118–4124 (2016).
pubmed: 27249672
El-Awady, J. A., Woodward, C., Dimiduk, D. M. & Ghoniem, N. M. Effects of focused ion beam induced damage on the plasticity of micropillars. Phys. Rev. B 80, 104104 (2009).
Tang, L. J., Zhang, Y. J., Bosman, M. & Woo, J. Study of Ion beam damage on FIB prepared TEM samples. Proc. Int. Symp. Phys. Fail. Anal. Integr. Circuits, IPFA 1–4 (2010).
Han, W. Z., Ding, M. S. & Shan, Z. W. Cracking behavior of helium-irradiated small-volume copper. Scr. Mater. 147, 1–5 (2018).
Wang, Z. J., Allen, F. I., Shan, Z. W. & Hosemann, P. Mechanical behavior of copper containing a gas-bubble superlattice. Acta Mater. 121, 78–84 (2016).
Han, W. Z. et al. Helium Nanobubbles Enhance Superelasticity and Retard Shear Localization in Small-Volume Shape Memory Alloy. Nano Lett. 17, 3725–3730 (2017).
pubmed: 28489391
Ding, M. S. et al. Nanobubble fragmentation and bubble-free-channel shear localization in helium-irradiated submicron-sized copper. Phys. Rev. Lett. 117, 1–5 (2016).
Yang, Y., Frazer, D., Balooch, M. & Hosemann, P. Irradiation damage investigation of helium implanted polycrystalline copper. J. Nucl. Mater. 512, 137–143 (2018).
Gludovatz, B. et al. A Fracture-Resistant High-Entropy Alloy for Cryogenic Applications. ChemInform 45, 1153–1158 (2014).
Otto, F. et al. The influences of temperature and microstructure on the tensile properties of a CoCrFeMnNi high-entropy alloy. Acta Mater. 61, 5743–5755 (2013).
Gali, A. & George, E. P. Tensile properties of high- and medium-entropy alloys. Intermetallics 39, 74–78 (2013).
George, E. P., Raabe, D. & Ritchie, R. O. High-entropy alloys. Nat. Rev. Mater. 4, 515–534 (2019).
Gludovatz, B., George, E. P. & Ritchie, R. O. Processing, Microstructure and Mechanical Properties of the CrMnFeCoNi High-Entropy Alloy. Jom 67, 2262–2270 (2015).
Giannuzzi, L. A. & Stevie, F. A. Introduction to focused ion beams: Instrumentation, theory, techniques and practice. Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (Springer US, 2005).
Wolff, A. et al. Modelling of focused ion beam induced increases in sample temperature: a case study of heat damage in biological samples. J. Microsc. 272, 47–59 (2018).
pubmed: 30019759
Shan, Z. In situ TEM investigation of the mechanical behavior of micronanoscaled metal pillars. Jom 64, 1229–1234 (2012).
Miracle, D. B. & Senkov, O. N. A critical review of high entropy alloys and related concepts. Acta Mater. 122, 448–511 (2017).
Zaddach, A. J., Scattergood, R. O. & Koch, C. C. Tensile properties of low-stacking fault energy high-entropy alloys. Mater. Sci. Eng. A 636, 373–378 (2015).
Chen, Y., An, X. & Liao, X. Mechanical behaviors of nanowires. Appl. Phys. Rev. 4, 031104 (2017).
Zhu, T. & Li, J. Ultra-strength materials. Prog. Mater. Sci. 55, 710–757 (2010).
Kiener, D., Grosinger, W., Dehm, G. & Pippan, R. A further step towards an understanding of size-dependent crystal plasticity: In situ tension experiments of miniaturized single-crystal copper samples. Acta Mater. 56, 580–592 (2008).
Mompiou, F. et al. Source-based strengthening of sub-micrometer Al fibers. Acta Mater. 60, 977–983 (2012).
Maaß, R. & Derlet, P. M. Micro-plasticity and recent insights from intermittent and small-scale plasticity. Acta Materialia 143, 338–363 (2018).
Wang, Z. J. et al. Sample size effects on the large strain bursts in submicron aluminum pillars. Appl. Phys. Lett. 100, 1–4 (2012).
Oh, S. H., Legros, M., Kiener, D. & Dehm, G. In situ observation of dislocation nucleation and escape in a submicrometre aluminium single crystal. Nat. Mater. 8, 95–100 (2009).
pubmed: 19151703
Nix, W. D. & Lee, S. W. Micro-pillar plasticity controlled by dislocation nucleation at surfaces. Philos. Mag. 91, 1084–1096 (2011).
Sumino, K. & Imai, M. Interaction of dislocations with impurities in silicon crystals studied by in situ x-ray topography. Philos. Mag. B Phys. Condens. Matter; Stat. Mech. Electron. Opt. Magn. Prop. 47, 753–766 (1983).
Stach, E. A., Hull, R., Bean, J. C., Jones, K. S. & Nejim, A. In Situ Studies of the Interaction of Dislocations with Point Defects during Annealing of Ion Implanted Si/SiGe/Si (001) Heterostructures. Microsc. Microanal. 4, 294–307 (1998).
pubmed: 9767667
Yensen, T. D. Effect of impurities on ferromagnetism. Phys. Rev. 39, 358–363 (1932).
McCaffrey, J. P., Phaneuf, M. W. & Madsen, L. D. Surface damage formation during ion-beam thinning of samples for transmission electron microscopy. Ultramicroscopy 87, 97–104 (2001).
pubmed: 11330503
Lu, L., Chen, X., Huang, X. & Lu, K. Revealing the maximum strength in nanotwinned copper. Science 323, 607–610 (2009).
pubmed: 19179523
Zhu, Y. T., Liao, X. Z. & Wu, X. L. Deformation twinning in nanocrystalline materials. Prog. Mater. Sci. 57, 1–62 (2012).
Gallagher, P. C. J. The influence of alloying, temperature, and related effects on the stacking fault energy. Metall. Trans. 1, 2429–2461 (1970).
Sandlöbes, S. et al. The relation between ductility and stacking fault energies in Mg and Mg-Y alloys. Acta Mater. 60, 3011–3021 (2012).
Ziegler, J. F. & Biersack, J. P. The Stopping and Range of Ions in Matter. in Treatise on Heavy-Ion Science 93–129 (Springer US, 1985).
Möller, W. TRI3DYN - Collisional computer simulation of the dynamic evolution of 3-dimensional nanostructures under ion irradiation. Nucl. Instruments Methods Phys. Res. Sect. B Beam Interact. with Mater. Atoms 322, 23–33 (2014).