A vibrating beam MEMS accelerometer for gravity and seismic measurements.
Journal
Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288
Informations de publication
Date de publication:
26 Jun 2020
26 Jun 2020
Historique:
received:
08
02
2020
accepted:
01
06
2020
entrez:
28
6
2020
pubmed:
28
6
2020
medline:
28
6
2020
Statut:
epublish
Résumé
This paper introduces a differential vibrating beam MEMS accelerometer demonstrating excellent long-term stability for applications in gravimetry and seismology. The MEMS gravimeter module demonstrates an output Allan deviation of 9 μGal for a 1000 s integration time, a noise floor of 100 μGal/√Hz, and measurement over the full ±1 g dynamic range (1 g = 9.81 ms
Identifiants
pubmed: 32591608
doi: 10.1038/s41598-020-67046-x
pii: 10.1038/s41598-020-67046-x
pmc: PMC7320019
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
10415Références
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