Solid-state membranes formed on natural menisci.
Journal
Nanotechnology
ISSN: 1361-6528
Titre abrégé: Nanotechnology
Pays: England
ID NLM: 101241272
Informations de publication
Date de publication:
30 Oct 2020
30 Oct 2020
Historique:
pubmed:
18
7
2020
medline:
18
7
2020
entrez:
18
7
2020
Statut:
ppublish
Résumé
We present a method to create robust, nanoscale solid-state membranes using the natural shape of a liquid meniscus as a template. A narrow, open channel is etched into a silicon substrate and then a photoresist polymer is introduced into the channel through spontaneous capillary action. The natural concave meniscus formed by the polymer is then covered by a thin chemical vapor deposited membrane. The polymer is removed by sacrificial etching, leaving behind a suspended membrane. Membranes as large as 20 μm by 9 mm can be fabricated with a thickness as low as 50 nm.
Identifiants
pubmed: 32679580
doi: 10.1088/1361-6528/aba711
pmc: PMC7931637
mid: NIHMS1674092
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
445303Subventions
Organisme : NIBIB NIH HHS
ID : R01 EB028608
Pays : United States
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