High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range.
Journal
Optics letters
ISSN: 1539-4794
Titre abrégé: Opt Lett
Pays: United States
ID NLM: 7708433
Informations de publication
Date de publication:
01 Aug 2020
01 Aug 2020
Historique:
entrez:
1
8
2020
pubmed:
1
8
2020
medline:
1
8
2020
Statut:
ppublish
Résumé
We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond
Identifiants
pubmed: 32735269
pii: 433765
doi: 10.1364/OL.396356
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM