In-situ interferometric monitoring of optical coatings.
Journal
Optics express
ISSN: 1094-4087
Titre abrégé: Opt Express
Pays: United States
ID NLM: 101137103
Informations de publication
Date de publication:
20 Jul 2020
20 Jul 2020
Historique:
entrez:
6
8
2020
pubmed:
6
8
2020
medline:
6
8
2020
Statut:
ppublish
Résumé
We present a new method for the in situ measurement of the amplitude and phase of the reflection coefficient of a plane substrate installed in a mechanical holder rotating at high speed (120 turns per minute) during the deposition of optical thin films. Our method is based on digital holography and uses a self-referenced scheme to cancel the effects of the severe constraints generated by the vibrational and thermal environment of the deposition machine.
Identifiants
pubmed: 32752470
pii: 433369
doi: 10.1364/OE.394953
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM