In-situ interferometric monitoring of optical coatings.


Journal

Optics express
ISSN: 1094-4087
Titre abrégé: Opt Express
Pays: United States
ID NLM: 101137103

Informations de publication

Date de publication:
20 Jul 2020
Historique:
entrez: 6 8 2020
pubmed: 6 8 2020
medline: 6 8 2020
Statut: ppublish

Résumé

We present a new method for the in situ measurement of the amplitude and phase of the reflection coefficient of a plane substrate installed in a mechanical holder rotating at high speed (120 turns per minute) during the deposition of optical thin films. Our method is based on digital holography and uses a self-referenced scheme to cancel the effects of the severe constraints generated by the vibrational and thermal environment of the deposition machine.

Identifiants

pubmed: 32752470
pii: 433369
doi: 10.1364/OE.394953
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

22012-22026

Auteurs

Classifications MeSH