Nanoelectromechanical Sensors Based on Suspended 2D Materials.
Journal
Research (Washington, D.C.)
ISSN: 2639-5274
Titre abrégé: Research (Wash D C)
Pays: United States
ID NLM: 101747148
Informations de publication
Date de publication:
2020
2020
Historique:
received:
11
02
2020
accepted:
23
04
2020
entrez:
9
8
2020
pubmed:
9
8
2020
medline:
9
8
2020
Statut:
epublish
Résumé
The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.
Identifiants
pubmed: 32766550
doi: 10.34133/2020/8748602
pmc: PMC7388062
doi:
Types de publication
Journal Article
Review
Langues
eng
Pagination
8748602Informations de copyright
Copyright © 2020 Max C. Lemme et al.
Déclaration de conflit d'intérêts
The authors declare that there are no conflicts of interest regarding the publication of this article.
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