Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films-Effects of Decomposition and Surface Desorption.
ZnO
annealing
decomposition
e-beam
microstructure
optical constants
segregation
Journal
Materials (Basel, Switzerland)
ISSN: 1996-1944
Titre abrégé: Materials (Basel)
Pays: Switzerland
ID NLM: 101555929
Informations de publication
Date de publication:
09 Aug 2020
09 Aug 2020
Historique:
received:
18
07
2020
revised:
05
08
2020
accepted:
06
08
2020
entrez:
14
8
2020
pubmed:
14
8
2020
medline:
14
8
2020
Statut:
epublish
Résumé
Zinc oxide films have been fabricated by the electron beam physical vapour deposition (PVD) technique. The effect of substrate temperature during fabrication and annealing temperature (carried out in ultra high vacuum conditions) has been investigated by means of atomic force microscopy, scanning electron microscopy, powder X-ray diffraction, X-ray photoelectron spectroscopy and spectroscopic ellipsometry. It was found that the layer deposited at room temperature is composed of Zn and ZnO crystallites with a number of orientations, whereas those grown at 100 and 200 ∘C consist of ZnO grains and exhibit privileged growth direction. Presented results clearly show the influence of ZnO decomposition and segregation of Zn atoms during evaporation and post-deposition annealing on microstructure and optical properties of zinc oxide films.
Identifiants
pubmed: 32784875
pii: ma13163510
doi: 10.3390/ma13163510
pmc: PMC7475817
pii:
doi:
Types de publication
Journal Article
Langues
eng
Références
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