Reflecting properties of narrowband Si/Al/Sc multilayer mirrors at 58.4 nm.
Journal
Optics letters
ISSN: 1539-4794
Titre abrégé: Opt Lett
Pays: United States
ID NLM: 7708433
Informations de publication
Date de publication:
01 Sep 2020
01 Sep 2020
Historique:
entrez:
2
9
2020
pubmed:
2
9
2020
medline:
2
9
2020
Statut:
ppublish
Résumé
This study considers the reflective characteristics of three-component Si/Al/Sc multilayer mirrors with a
Identifiants
pubmed: 32870826
pii: 434482
doi: 10.1364/OL.400526
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM