Single-shot characterization of strongly focused coherent XUV and soft X-ray beams.

In this Letter, we present a novel, to the best of our knowledge, single-shot method for characterizing focused coherent beams. We utilize a dedicated amplitude-only mask, in combination with an iterative phase retrieval algorithm, to reconstruct the amplitude and phase of a focused beam from a single measured far-field diffraction pattern alone. In a proof-of-principle experiment at a wavelength of 13.5 nm, we demonstrate our new method and obtain an RMS phase error of better than