Experimental setup for high-temperature in situ studies of crystallization of thin films with atmosphere control.
chemical solution deposition
high-temperature thin-film environments
in situ studies
synchrotron X-ray diffraction
thin films
Journal
Journal of synchrotron radiation
ISSN: 1600-5775
Titre abrégé: J Synchrotron Radiat
Pays: United States
ID NLM: 9888878
Informations de publication
Date de publication:
01 Sep 2020
01 Sep 2020
Historique:
received:
02
05
2020
accepted:
22
07
2020
entrez:
3
9
2020
pubmed:
3
9
2020
medline:
3
9
2020
Statut:
ppublish
Résumé
Understanding the crystallization process for chemical solution deposition (CSD) processed thin films is key in designing the fabrication strategy for obtaining high-quality devices. Here, an in situ sample environment is presented for studying the crystallization of CSD processed thin films under typical processing parameters using near-grazing-incidence synchrotron X-ray diffraction. Typically, the pyrolysis is performed in a rapid thermal processing (RTP) unit, where high heating rates, high temperatures and atmosphere control are the main control parameters. The presented in situ setup can reach heating rates of 20°C s
Identifiants
pubmed: 32876595
pii: S1600577520010140
doi: 10.1107/S1600577520010140
pmc: PMC7467347
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
1209-1217Subventions
Organisme : Norges Forskningsråd
ID : 250403
Organisme : Norges Forskningsråd
ID : 2459637F50
Informations de copyright
open access.
Références
J Am Chem Soc. 2012 Apr 18;134(15):6785-92
pubmed: 22420861
IUCrJ. 2019 Feb 21;6(Pt 2):290-298
pubmed: 30867926
J Appl Crystallogr. 2015 Mar 24;48(Pt 2):510-519
pubmed: 25844080
Angew Chem Int Ed Engl. 2010;49(4):763-6
pubmed: 20017176
Phys Rev Lett. 2019 Jul 26;123(4):045701
pubmed: 31491279
IUCrJ. 2019 Feb 23;6(Pt 2):299-304
pubmed: 30867927
Chem Soc Rev. 2014 Apr 7;43(7):2125-40
pubmed: 24121276
Angew Chem Int Ed Engl. 2017 Aug 21;56(35):10367-10372
pubmed: 28670829
Science. 1996 Aug 16;273(5277):903-9
pubmed: 8688066
Rev Sci Instrum. 2015 May;86(5):053906
pubmed: 26026535
Acta Crystallogr B. 2006 Dec;62(Pt 6):960-5
pubmed: 17108647
J Synchrotron Radiat. 2016 May;23(Pt 3):825-9
pubmed: 27140164
Angew Chem Int Ed Engl. 2016 May 23;55(22):6540-4
pubmed: 27101324
Materials (Basel). 2019 Jun 26;12(13):
pubmed: 31247910
R Soc Open Sci. 2019 Jan 2;6(1):180989
pubmed: 30800353
Nano Lett. 2015 Aug 12;15(8):5630-4
pubmed: 26236916
Materials (Basel). 2017 Feb 22;10(2):
pubmed: 28772576