Uniform High-k Amorphous Native Oxide Synthesized by Oxygen Plasma for Top-Gated Transistors.

2D materials Bi2O2Se high-k native oxide oxygen plasma transistors

Journal

Nano letters
ISSN: 1530-6992
Titre abrégé: Nano Lett
Pays: United States
ID NLM: 101088070

Informations de publication

Date de publication:
14 Oct 2020
Historique:
pubmed: 4 9 2020
medline: 4 9 2020
entrez: 4 9 2020
Statut: ppublish

Résumé

The integration of high-k gate dielectrics with two-dimensional (2D) semiconducting channel materials is essential for high-performance and low-power electronics. However, the conformal deposition of a uniform high-k dielectric with sub-1 nm equivalent oxide thickness (EOT) and high interface quality on high-mobility 2D semiconductors is still challenging. Here, we report a facile approach to synthesize a uniform high-k (ε

Identifiants

DOI: 10.1021/acs.nanolett.0c02951 PMID: 32881534
pubmed: 32881534
doi: 10.1021/acs.nanolett.0c02951
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

7469-7475

Auteurs

Teng Tu (T)

Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China.

Yichi Zhang (Y)

Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China.

Tianran Li (T)

Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China.

Jia Yu (J)

Department of Physics, University of Texas at Austin, Austin, Texas 78712, United States.

Lingmei Liu (L)

Advanced Membranes and Porous Materials (AMPM) Center, Physical Sciences and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia.
ORCID: 0000-0002-3273-9884

Jinxiong Wu (J)

Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China.
Tianjin Key Lab for Rare Earth Materials and Applications, Center for Rare Earth and Inorganic Functional Materials, School of Materials Science and Engineering, National Institute for Advanced Materials, Nankai University, Tianjin 300350, China.

Congwei Tan (C)

Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China.

Jilin Tang (J)

Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China.

Yan Liang (Y)

Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China.

Congcong Zhang (C)

Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China.

Yumin Dai (Y)

Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China.

Yu Han (Y)

Advanced Membranes and Porous Materials (AMPM) Center, Physical Sciences and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia.
ORCID: 0000-0003-1462-1118

Keji Lai (K)

Department of Physics, University of Texas at Austin, Austin, Texas 78712, United States.

Hailin Peng (H)

Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China.
ORCID: 0000-0003-1569-0238

Classifications MeSH