An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization.
atomic force microscopy (AFM)
combined setup
correlative microscopy
helium ion microscopy (HIM)
self-sensing cantilevers
Journal
Beilstein journal of nanotechnology
ISSN: 2190-4286
Titre abrégé: Beilstein J Nanotechnol
Pays: Germany
ID NLM: 101551563
Informations de publication
Date de publication:
2020
2020
Historique:
received:
01
04
2020
accepted:
30
07
2020
entrez:
21
9
2020
pubmed:
22
9
2020
medline:
22
9
2020
Statut:
epublish
Résumé
In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a well-established versatile tool for multiparametric nanoscale characterization. Combining the two techniques opens the way for unprecedented in situ correlative analysis at the nanoscale. Nanomachining and analysis can be performed without contamination of the sample and environmental changes between processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques. The AFM offers not only true 3D topography maps, something the HIM can only provide in an indirect way, but also allows for nanomechanical property mapping, as well as for electrical and magnetic characterization of the sample after focused ion beam materials modification with the HIM. The experimental setup is described and evaluated through a series of correlative experiments, demonstrating the feasibility of the integration.
Identifiants
pubmed: 32953371
doi: 10.3762/bjnano.11.111
pmc: PMC7476598
doi:
Types de publication
Journal Article
Langues
eng
Pagination
1272-1279Informations de copyright
Copyright © 2020, Andany et al.; licensee Beilstein-Institut.
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