Nanoscale patterning at the Si/SiO

Journal

Nanotechnology
ISSN: 1361-6528
Titre abrégé: Nanotechnology
Pays: England
ID NLM: 101241272

Informations de publication

Date de publication:
11 Dec 2020
Historique:
pubmed: 7 10 2020
medline: 7 10 2020
entrez: 6 10 2020
Statut: ppublish

Résumé

We have studied the capability of He

Identifiants

DOI: 10.1088/1361-6528/abb5cf PMID: 33021238
pubmed: 33021238
doi: 10.1088/1361-6528/abb5cf
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

505302

Auteurs

Artur Böttcher (A)

Institute of Physical Chemistry, Karlsruhe Institute of Technology (KIT), Fritz-Haber-Weg 2, D-76131, Karlsruhe, Germany.
ORCID: 0000-0001-8477-1336

Ruth Schwaiger (R)

Institute for Applied Materials - Materials and Biomechanics, KIT, Hermann-von-Helmholtz-Platz 1, D-76344, Eggenstein-Leopoldshafen, Germany.
Institute of Energy and Climate Research IEK-2: Microstructure and Properties of Materials, Forschungszentrum Juelich GmbH, D-52425, Juelich, Germany.

Tobias M Pazdera (TM)

Institute of Physical Chemistry, Karlsruhe Institute of Technology (KIT), Fritz-Haber-Weg 2, D-76131, Karlsruhe, Germany.

Daniela Exner (D)

Institute for Applied Materials - Materials and Biomechanics, KIT, Hermann-von-Helmholtz-Platz 1, D-76344, Eggenstein-Leopoldshafen, Germany.

Jakob Hauns (J)

Institute of Physical Chemistry, Karlsruhe Institute of Technology (KIT), Fritz-Haber-Weg 2, D-76131, Karlsruhe, Germany.

Dmitry Strelnikov (D)

Institute of Physical Chemistry, Karlsruhe Institute of Technology (KIT), Fritz-Haber-Weg 2, D-76131, Karlsruhe, Germany.

Sergei Lebedkin (S)

Institute of Nanotechnology, KIT, Hermann-von-Helmholtz-Platz 1, D-76344, Eggenstein-Leopolds-hafen, Germany.

Roland Gröger (R)

Institute of Applied Physics, KIT, Wolfgang-Gaede-Straße 1, D-76131, Karlsruhe, Germany.

Friedrich Esch (F)

Chair of Physical Chemistry, Department of Chemistry & Catalysis Research Center, Technical University of Munich, Lichtenbergstr. 4, D-85748, Garching, Germany.

Barbara A J Lechner (BAJ)

Chair of Physical Chemistry, Department of Chemistry & Catalysis Research Center, Technical University of Munich, Lichtenbergstr. 4, D-85748, Garching, Germany.

Manfred M Kappes (MM)

Institute of Physical Chemistry, Karlsruhe Institute of Technology (KIT), Fritz-Haber-Weg 2, D-76131, Karlsruhe, Germany.
Institute of Nanotechnology, KIT, Hermann-von-Helmholtz-Platz 1, D-76344, Eggenstein-Leopolds-hafen, Germany.

Classifications MeSH