Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks.
Journal
Nature materials
ISSN: 1476-4660
Titre abrégé: Nat Mater
Pays: England
ID NLM: 101155473
Informations de publication
Date de publication:
Jan 2021
Jan 2021
Historique:
received:
11
04
2020
accepted:
14
09
2020
pubmed:
28
10
2020
medline:
28
10
2020
entrez:
27
10
2020
Statut:
ppublish
Résumé
Metal-organic frameworks (MOFs) offer disruptive potential in micro- and optoelectronics because of the unique properties of these microporous materials. Nanoscale patterning is a fundamental step in the implementation of MOFs in miniaturized solid-state devices. Conventional MOF patterning methods suffer from low resolution and poorly defined pattern edges. Here, we demonstrate the resist-free, direct X-ray and electron-beam lithography of MOFs. This process avoids etching damage and contamination and leaves the porosity and crystallinity of the patterned MOFs intact. The resulting high-quality patterns have excellent sub-50-nm resolution, and approach the mesopore regime. The compatibility of X-ray and electron-beam lithography with existing micro- and nanofabrication processes will facilitate the integration of MOFs in miniaturized devices.
Identifiants
pubmed: 33106648
doi: 10.1038/s41563-020-00827-x
pii: 10.1038/s41563-020-00827-x
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
93-99Subventions
Organisme : EC | EU Framework Programme for Research and Innovation H2020 | H2020 Priority Excellent Science | H2020 Marie Skłodowska-Curie Actions (H2020 Excellent Science - Marie Skłodowska-Curie Actions)
ID : 708439
Organisme : EC | EU Framework Programme for Research and Innovation H2020 | H2020 Priority Excellent Science | H2020 European Research Council (H2020 Excellent Science - European Research Council)
ID : 716472
Organisme : EC | EU Framework Programme for Research and Innovation H2020 | H2020 Priority Excellent Science | H2020 European Research Council (H2020 Excellent Science - European Research Council)
ID : 771834
Organisme : EC | EU Framework Programme for Research and Innovation H2020 | H2020 Priority Excellent Science | H2020 European Research Council (H2020 Excellent Science - European Research Council)
ID : LP-03
Organisme : Fonds Wetenschappelijk Onderzoek (Research Foundation Flanders)
ID : 12ZK720N
Organisme : Fonds Wetenschappelijk Onderzoek (Research Foundation Flanders)
ID : 1501618N
Organisme : Fonds Wetenschappelijk Onderzoek (Research Foundation Flanders)
ID : G0H0716N
Organisme : Deutsche Forschungsgemeinschaft (German Research Foundation)
ID : COORNETs
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