Reduction of Dark Current in CMOS Image Sensor Pixels Using Hydrocarbon-Molecular-Ion-Implanted Double Epitaxial Si Wafers.
CMOS image sensor
gettering
oxygen
white spot defects
Journal
Sensors (Basel, Switzerland)
ISSN: 1424-8220
Titre abrégé: Sensors (Basel)
Pays: Switzerland
ID NLM: 101204366
Informations de publication
Date de publication:
19 Nov 2020
19 Nov 2020
Historique:
received:
22
10
2020
revised:
13
11
2020
accepted:
17
11
2020
entrez:
24
11
2020
pubmed:
25
11
2020
medline:
25
11
2020
Statut:
epublish
Résumé
The impact of hydrocarbon-molecular (C
Identifiants
pubmed: 33228009
pii: s20226620
doi: 10.3390/s20226620
pmc: PMC7699194
pii:
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Références
Sensors (Basel). 2019 May 04;19(9):
pubmed: 31060216