A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air.
RF MEMS
SH0 mode
high-temperature
lithium niobate
piezoelectric resonators
Journal
Sensors (Basel, Switzerland)
ISSN: 1424-8220
Titre abrégé: Sensors (Basel)
Pays: Switzerland
ID NLM: 101204366
Informations de publication
Date de publication:
29 Dec 2020
29 Dec 2020
Historique:
received:
12
11
2020
revised:
16
12
2020
accepted:
23
12
2020
entrez:
1
1
2021
pubmed:
2
1
2021
medline:
2
1
2021
Statut:
epublish
Résumé
This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO
Identifiants
pubmed: 33383685
pii: s21010149
doi: 10.3390/s21010149
pmc: PMC7795216
pii:
doi:
Types de publication
Letter
Langues
eng
Sous-ensembles de citation
IM
Subventions
Organisme : NASA
ID : NNX17AG44G
Pays : United States
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pubmed: 18064127
IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Mar;57(3):524-32
pubmed: 20211766
IEEE Trans Ultrason Ferroelectr Freq Control. 2004 Nov;51(11):1427-31
pubmed: 15600086