In-vacuum active colour sensor and wireless communication across a vacuum-air interface.


Journal

Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288

Informations de publication

Date de publication:
14 01 2021
Historique:
received: 16 03 2020
accepted: 16 12 2020
entrez: 15 1 2021
pubmed: 16 1 2021
medline: 16 1 2021
Statut: epublish

Résumé

In situ sensing with wireless digital-data transfer is a potential processing scheme that works very closely to the location of an event monitored by a sensor and converts the sensor's raw output into digitized and informative small-volume bits, as suggested by recent proposals for edge computing and the Internet of Things (IoT). Colour perception may be a target of in situ sensor data acquisition; however, in contrast to from other sensing devices, colour sensors that detect visible light signals are usually located away from light-emitting sources, collecting light transmitting through the space and attenuating it in some manner. For example, in a vacuum chamber whose gas pressure is much less than the ambient atmosphere in which the sensors usually work, there are many veiled light sources, such as discharge plasma, for various industrial purposes including nanoscale manufacturing. In this study, we designed an in-vacuum colour sensor that can work with analogue-to-digital conversion and transfer data by wireless communication; this sensor is active in a low-pressure plasma chamber, detecting light signals and transferring them to a personal computer located outside the vacuum chamber. In addition to detecting lights with controlled spectra from outside successfully, we achieved complete operation of our in-vacuum active sensor for plasma emissions generated at 100 Pa. Comparing the signals with data from simultaneous monitoring by a monochromator, we established that the recorded signals arose from the plasma, confirming successful direct detection of low-pressure plasma emissions without any filtering effects between the sensor and the target object.

Identifiants

pubmed: 33446804
doi: 10.1038/s41598-020-80501-z
pii: 10.1038/s41598-020-80501-z
pmc: PMC7809036
doi:

Types de publication

Journal Article Research Support, Non-U.S. Gov't

Langues

eng

Sous-ensembles de citation

IM

Pagination

1364

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Auteurs

Osamu Sakai (O)

Department of Electronic Systems Engineering, The University of Shiga Prefecture, 2500 Hassaka-cho, Hikone, Shiga, 522-8533, Japan. sakai.o@e.usp.ac.jp.
Regional ICT Research Center for Human, Industry and Future, The University of Shiga Prefecture, 2500 Hassaka-cho, Hikone, Shiga, 522-8533, Japan. sakai.o@e.usp.ac.jp.

Takayuki Kitagawa (T)

R&D Department, Sakigake Semiconductor Co., Ltd, 50 Onmaeda-cho, Nishishichijo, Shimogyo-ku, Kyoto, 600-8897, Japan.

Keiji Sakurai (K)

Department of Electronic Systems Engineering, The University of Shiga Prefecture, 2500 Hassaka-cho, Hikone, Shiga, 522-8533, Japan.

Go Itami (G)

Department of Electronic Systems Engineering, The University of Shiga Prefecture, 2500 Hassaka-cho, Hikone, Shiga, 522-8533, Japan.

Shigeyuki Miyagi (S)

Department of Electronic Systems Engineering, The University of Shiga Prefecture, 2500 Hassaka-cho, Hikone, Shiga, 522-8533, Japan.
Regional ICT Research Center for Human, Industry and Future, The University of Shiga Prefecture, 2500 Hassaka-cho, Hikone, Shiga, 522-8533, Japan.

Kazuyuki Noborio (K)

R&D Department, Sakigake Semiconductor Co., Ltd, 50 Onmaeda-cho, Nishishichijo, Shimogyo-ku, Kyoto, 600-8897, Japan.

Kohshi Taguchi (K)

R&D Department, Sakigake Semiconductor Co., Ltd, 50 Onmaeda-cho, Nishishichijo, Shimogyo-ku, Kyoto, 600-8897, Japan.

Classifications MeSH