Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process.
a-BCN film
a-C film
magnetron sputtering
mechanical properties
structural properties
vacuum arc deposition
Journal
Materials (Basel, Switzerland)
ISSN: 1996-1944
Titre abrégé: Materials (Basel)
Pays: Switzerland
ID NLM: 101555929
Informations de publication
Date de publication:
03 Feb 2021
03 Feb 2021
Historique:
received:
15
01
2021
revised:
28
01
2021
accepted:
01
02
2021
entrez:
6
2
2021
pubmed:
7
2
2021
medline:
7
2
2021
Statut:
epublish
Résumé
Amorphous boron carbon nitride (a-BCN) films exhibit excellent properties such as high hardness and high wear resistance. However, the correlation between the film structure and its mechanical properties is not fully understood. In this study, a-BCN films were prepared by an arc-sputtering hybrid process under various coating conditions, and the correlations between the film's structure and mechanical properties were clarified. Glow discharge optical emission spectroscopy, X-ray photoelectron spectroscopy, Fourier-transform infrared spectroscopy, and Raman spectroscopy were used to analyze the structural properties and chemical composition. Nanoindentation and ball-on-disc tests were performed to evaluate the hardness and to estimate the friction coefficient and wear volume, respectively. The results indicated that the mechanical properties strongly depend on the carbon content in the film; it decreases significantly when the carbon content is <90%. On the other hand, by controlling the contents of boron and nitrogen to a very small amount (up to 2.5 at.%), it is possible to synthesize a film that has nearly the same hardness and friction coefficient as those of an amorphous carbon (a-C) film and better wear resistance than the a-C film.
Identifiants
pubmed: 33546509
pii: ma14040719
doi: 10.3390/ma14040719
pmc: PMC7913669
pii:
doi:
Types de publication
Journal Article
Langues
eng
Subventions
Organisme : Japan Society for the Promotion of Science
ID : 16H02406
Organisme : Japan Society for the Promotion of Science
ID : 19K14840
Déclaration de conflit d'intérêts
The authors declare no conflicts of interest.
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