Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level.
aspheric and freeform optical elements
dimensional metrology
measured data evaluation
robust reference minimum zone (Hybrid Trust Region) fitting
ultra-high precision measuring machine
uncertainty
Journal
Sensors (Basel, Switzerland)
ISSN: 1424-8220
Titre abrégé: Sensors (Basel)
Pays: Switzerland
ID NLM: 101204366
Informations de publication
Date de publication:
05 Feb 2021
05 Feb 2021
Historique:
received:
16
01
2021
revised:
31
01
2021
accepted:
02
02
2021
entrez:
10
2
2021
pubmed:
11
2
2021
medline:
11
2
2021
Statut:
epublish
Résumé
The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.
Identifiants
pubmed: 33562598
pii: s21041103
doi: 10.3390/s21041103
pmc: PMC7915810
pii:
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Références
Sensors (Basel). 2018 Oct 18;18(10):
pubmed: 30340433
Sensors (Basel). 2019 Sep 16;19(18):
pubmed: 31527506