Fluoridation of HfO

Journal

Inorganic chemistry
ISSN: 1520-510X
Titre abrégé: Inorg Chem
Pays: United States
ID NLM: 0366543

Informations de publication

Date de publication:
05 Apr 2021
Historique:
pubmed: 6 3 2021
medline: 6 3 2021
entrez: 5 3 2021
Statut: ppublish

Résumé

Fluoridation of HfO

Identifiants

DOI: 10.1021/acs.inorgchem.0c03254 PMID: 33667068
pubmed: 33667068
doi: 10.1021/acs.inorgchem.0c03254
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

4463-4474

Auteurs

Steven Flynn (S)

Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States.
ORCID: 0000-0001-8262-6987

Chi Zhang (C)

Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States.

Kent J Griffith (KJ)

Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States.
ORCID: 0000-0002-8096-906X

Jiahong Shen (J)

Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States.

Christopher Wolverton (C)

Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States.
ORCID: 0000-0003-2248-474X

Vinayak P Dravid (VP)

Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States.
ORCID: 0000-0002-6007-3063

Kenneth R Poeppelmeier (KR)

Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States.
ORCID: 0000-0003-1655-9127

Classifications MeSH