Analytic Optimization of Cantilevers for Photoacoustic Gas Sensor with Capacitive Transduction.

MEMS analytic model cantilever capacitive detection gas sensor photoacoustics

Journal

Sensors (Basel, Switzerland)
ISSN: 1424-8220
Titre abrégé: Sensors (Basel)
Pays: Switzerland
ID NLM: 101204366

Informations de publication

Date de publication:
21 Feb 2021
Historique:
received: 20 01 2021
revised: 15 02 2021
accepted: 18 02 2021
entrez: 6 3 2021
pubmed: 7 3 2021
medline: 7 3 2021
Statut: epublish

Résumé

We propose a new concept of photoacoustic gas sensing based on capacitive transduction which allows full integration while conserving the required characteristics of the sensor. For the sensor's performance optimization, trial and error method is not feasible due to economic and time constrains. Therefore, we focus on a theoretical optimization of the sensor reinforced by computational methods implemented in a Python programming environment. We present an analytic model to optimize the geometry of a cantilever used as a capacitive transducer in photoacoustic spectroscopy. We describe all the physical parameters which have to be considered for this optimization (photoacoustic force, damping, mechanical susceptibility, capacitive transduction, etc.). These parameters are characterized by opposite trends. They are studied and compared to obtain geometric values for which the signal output and signal-to-noise ratio are maximized.

Identifiants

pubmed: 33669992
pii: s21041489
doi: 10.3390/s21041489
pmc: PMC7926384
pii:
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Subventions

Organisme : Agence Nationale de la Recherche
ID : ANR-18-CE04-0002-01
Organisme : Agence Nationale de la Recherche
ID : ANR-16-CE04-0012
Organisme : Région Occitanie Pyrénées-Méditerranée
ID : 19011705 - ESR_PREMAT-191
Organisme : Direction Générale de l'Armement
ID : phd-funding

Références

Opt Lett. 1998 Feb 1;23(3):219-21
pubmed: 18084465
Opt Express. 2019 Mar 4;27(5):7435-7446
pubmed: 30876307
Sensors (Basel). 2019 Sep 24;19(19):
pubmed: 31554194
Proc IEEE Inst Electr Electron Eng. 2009;97(3):513-552
pubmed: 20198118
Opt Lett. 2002 Nov 1;27(21):1902-4
pubmed: 18033396
Appl Opt. 2003 Nov 20;42(33):6728-38
pubmed: 14658477
Opt Express. 2019 Feb 18;27(4):4271-4280
pubmed: 30876044
Sensors (Basel). 2012;12(7):9635-65
pubmed: 23012563

Auteurs

Wioletta Trzpil (W)

IES, University Montpellier, CNRS, 34095 Montpellier, France.

Nicolas Maurin (N)

IES, University Montpellier, CNRS, 34095 Montpellier, France.

Roman Rousseau (R)

IES, University Montpellier, CNRS, 34095 Montpellier, France.

Diba Ayache (D)

IES, University Montpellier, CNRS, 34095 Montpellier, France.

Aurore Vicet (A)

IES, University Montpellier, CNRS, 34095 Montpellier, France.

Michael Bahriz (M)

IES, University Montpellier, CNRS, 34095 Montpellier, France.

Classifications MeSH