Impact of device scaling on the electrical properties of MoS


Journal

Scientific reports
ISSN: 2045-2322
Titre abrégé: Sci Rep
Pays: England
ID NLM: 101563288

Informations de publication

Date de publication:
23 Mar 2021
Historique:
received: 06 01 2021
accepted: 04 03 2021
entrez: 24 3 2021
pubmed: 25 3 2021
medline: 25 3 2021
Statut: epublish

Résumé

Two-dimensional semiconducting materials are considered as ideal candidates for ultimate device scaling. However, a systematic study on the performance and variability impact of scaling the different device dimensions is still lacking. Here we investigate the scaling behavior across 1300 devices fabricated on large-area grown MoS

Identifiants

pubmed: 33758215
doi: 10.1038/s41598-021-85968-y
pii: 10.1038/s41598-021-85968-y
pmc: PMC7987965
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

6610

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Auteurs

Goutham Arutchelvan (G)

IMEC, Leuven, Belgium. goutham.arutchelvan@imec.be.
KU Leuven, Leuven, Belgium. goutham.arutchelvan@imec.be.

Quentin Smets (Q)

IMEC, Leuven, Belgium.

Devin Verreck (D)

IMEC, Leuven, Belgium.

Zubair Ahmed (Z)

IMEC, Leuven, Belgium.

Abhinav Gaur (A)

KU Leuven, Leuven, Belgium.

Surajit Sutar (S)

IMEC, Leuven, Belgium.

Julien Jussot (J)

IMEC, Leuven, Belgium.

Benjamin Groven (B)

IMEC, Leuven, Belgium.

Marc Heyns (M)

IMEC, Leuven, Belgium.
KU Leuven, Leuven, Belgium.

Dennis Lin (D)

IMEC, Leuven, Belgium.

Inge Asselberghs (I)

IMEC, Leuven, Belgium.

Iuliana Radu (I)

IMEC, Leuven, Belgium.

Classifications MeSH