Fast X-ray Nanotomography with Sub-10 nm Resolution as a Powerful Imaging Tool for Nanotechnology and Energy Storage Applications.
X-rays
batteries
nanolithography
nanotomography
synchrotrons
transmission X-ray microscopy
Journal
Advanced materials (Deerfield Beach, Fla.)
ISSN: 1521-4095
Titre abrégé: Adv Mater
Pays: Germany
ID NLM: 9885358
Informations de publication
Date de publication:
May 2021
May 2021
Historique:
revised:
23
02
2021
received:
22
12
2020
pubmed:
20
4
2021
medline:
20
4
2021
entrez:
19
4
2021
Statut:
ppublish
Résumé
In the last decade, transmission X-ray microscopes (TXMs) have come into operation in most of the synchrotrons worldwide. They have proven to be outstanding tools for non-invasive ex and in situ 3D characterization of materials at the nanoscale across varying range of scientific applications. However, their spatial resolution has not improved in many years, while newly developed functional materials and microdevices with enhanced performances exhibit nanostructures always finer. Here, optomechanical breakthroughs leading to fast 3D tomographic acquisitions (85 min) with sub-10 nm spatial resolution, narrowing the gap between X-ray and electron microscopy, are reported. These new achievements are first validated with 3D characterizations of nanolithography objects corresponding to ultrahigh-aspect-ratio hard X-ray zone plates. Then, this powerful technique is used to investigate the morphology and conformality of nanometer-thick film electrodes synthesized by atomic layer deposition and magnetron sputtering deposition methods on 3D silicon scaffolds for electrochemical energy storage applications.
Identifiants
pubmed: 33871108
doi: 10.1002/adma.202008653
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
e2008653Informations de copyright
© 2021 Wiley-VCH GmbH.
Références
V. De Andrade, A. Deriy, M. J. Wojcik, D. Gürsoy, D. Shu, K. Fezzaa, F. De Carlo, SPIE Newsl. 2016, 10, 006461.
J. Andrews, S. Brennan, C. Patty, K. Luening, P. Pianetta, E. Almeida, M. van der Meulen, M. Feser, J. Gelb, J. Rudati, A. Tkachuk, W. Yun W, Synchrotron Radiat. News 2008, 21, 17.
I. Greving, F. Wilde, M. Ogurreck, J. Herzen, J. U. Hammel, A. Hipp, F. Friedrich, L. Lottermoser, T. Dose, H. Burmester, M. Muller, F. Beckmann, Proc. SPIE 2014, 9212, 92120O.
D. S. Coburn, E. Nazaretski, W. Xu, M. Ge, C. Longo, H. Xu, K. Gofron, Z. Yin, H. H. Chen, Y. Hwu, et al., Rev. Sci. Instrum. 2019, 90, 053701.
M. Ogurreck, F. Wilde, J. Herzen, F. Beckmann, V. Nazmov, J. Mohr, A. Haibel, M. Müller, A. Schreyer, J. Phys.: Conf. Ser. 2013, 425, 182002.
M. Stampanoni, F. Marone, G. Mikuljan, K. Jefimovs, P. Trtik, J. Vila-Comamala, C. David, R. Abela, J. Phys.: Conf. Ser. 2009, 186, 012018.
C. Zhao, T. Wada, V. De Andrade, D. Gürsoy, H. Kato, Y.-c. K. Chen-Wiegart, Nano Energy 2018, 52, 381.
S. Müller, P. Pietsch, B.-E. Brandt, P. Baade, V. De Andrade, F. De Carlo, V. Wood, Nat. Commun. 2018, 9, 2340.
T. Li, H. Kang, X. Zhou, C. Lim, B. Yan, V. De Andrade, F. De Carlo, L. Zhu, ACS Appl. Mater. Interfaces 2018, 10, 16927.
R. Elango, A. Demortière, V. De Andrade, M. Morcrette, V. Seznec, Adv. Energy Mater. 2018, 8, 1703031.
E. Eustache, C. Douard, A. Demortière, V. De Andrade, M. Brachet, J. Le Bideau, T. Brousse, C. Lethien, Adv. Mater. Technol. 2017, 2, 1700126.
M. Létiche, E. Eustache, J. Freixas, A. Demortière, V. De Andrade, L. Morgenroth, P. Tilmant, F. Vaurette, D. Troadec, P. Roussel, T. Brousse, C. Lethien, Adv. Energy Mater. 2017, 7, 1601402.
C. S. Kaira, C. Kantzos, J. J. Williams, V. De Andrade, F. De Carlo, N. Chawla, Acta Mater. 2018, 144, 419.
C. S. Kaira, T. J. Stannard, V. De Andrade, F. De Carlo, N. Chawla, Acta Mater. 2019, 176, 242.
W. Zhu, F. Fusseis, H. Lisabeth, T. Xing, X. Xiao, V. De Andrade, S.-i. Karato, Geophys. Res. Lett. 2016, 43, 9535.
K. Yuan, V. De Andrade, Z. Feng, N. C. Sturchio, S. S. Lee, P. Fenter, J. Phys. Chem. C 2018, 122, 2238.
K. Yuan, V. Starchenko, S. S. Lee, V. De Andrade, D. Gursoy, N. C. Sturchio, P. Fenter, ACS Earth Space Chem. 2019, 3, 833.
S. J. Normile, D. C. Sabarirajan, O. Calzada, V. De Andrade, X. Xiao, P. Mandal, D. Y. Parkinson, A. Serov, P. Atanassov, I. V. Zenyuk, Mater. Today Energy 2018, 9, 187.
S. Park, J. Bostwick, V. De Andrade, J. Je, Soft Matter 2017, 13, 8331.
R. Mizutani, R. Saiga, A. Takeuchi, K. Uesugi, Y. Terada, Y. Suzuki, V. De Andrade, F. De Carlo, S. Takekoshi, C. Inomoto, N. Nakamura, I. Kushima, S. Iritani, N. Ozaki, S. Ide, K. Ikeda, K. Oshima, M. Itokawa, M. Arai, Transl. Psychiatry 2019, 9, 85.
T.-Y. Chen, Y.-T. Chen, C.-L. Wang, I. M. Kempson, W.-K. Lee, Y. S. Chu, Y. Hwu, G. Margaritondo, Opt. Express 2011, 19, 19919.
I. Mohacsi, I. Vartiainen, B. Rösner, M. Guizar-Sicairos, V. A. Guzenko, I. McNulty, R. Winarski, M. V. Holt, C. David, Sci. Rep. 2017, 7, 43624.
J. Wang, Y.-c. Karen Chen, Q. Yuan, A. Tkachuk, C. Erdonmez, B. Hornberger, M. Feser, Appl. Phys. Lett. 2012, 100, 143107.
D. A. Grishina, C. A. Harteveld, A. Pacureanu, D. Devashish, A. Lagendijk, P. Cloetens, W. L. Vos, ACS Nano 2019, 13, 13932.
G. E. Moore, IEEE Solid-State Circuits Soc. Newsl. 2006, 11, 33.
M. Holler, M. Guizar-Sicairos, E. H. Tsai, R. Dinapoli, E. Müller, O. Bunk, J. Raabe, G. Aeppli, Nature 2017, 543, 402.
Y.-S. Yu, M. Farmand, C. Kim, Y. Liu, C. P. Grey, F. C. Strobridge, T. Tyliszczak, R. Celestre, P. Denes, J. Joseph, H. Krishnan, F. R. Maia, A. L. Kilcoyne, S. Marchesini, T. P. C. Leite, T. Warwick, H. Padmore, J. Cabana, D. A. Shapiro, Nat. Commun. 2018, 9, 921.
W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, D. T. Attwood, Nature 2005, 435, 1210.
K. Jefimovs, J. Vila-Comamala, T. Pilvi, J. Raabe, M. Ritala, C. David, Phys. Rev. Lett. 2007, 99, 264801.
K. Li, M. J. Wojcik, R. Divan, L. E. Ocola, B. Shi, D. Rosenmann, C. Jacobsen, J. Vac. Sci. Technol., B: Nanotechnol. Microelectron.: Mater., Process., Meas., Phenom. 2017, 35, 06G901.
K. Li, S. Ali, M. Wojcik, V. De Andrade, X. Huang, H. Yan, Y. S. Chu, E. Nazaretski, A. Pattammattel, C. Jacobsen, Optica 2020, 7, 410.
M. Van Heel, M. Schatz, J. Struct. Biol. 2005, 151, 250.
V. Nikitin, V. D. Andrade, A. Slyamov, B. J. Gould, Y. Zhang, V. Sampathkumar, N. Kasthuri, D. Gursoy, F. D. Carlo, IEEE Transact. Comput. Imaging 2021, 7, 272.
P. Jeżowski, O. Crosnier, E. Deunf, P. Poizot, F. Béguin, T. Brousse, Nat. Mater. 2018, 17, 167.
Y. Shao, M. F. El-Kady, J. Sun, Y. Li, Q. Zhang, M. Zhu, H. Wang, B. Dunn, R. B. Kaner, Chem. Rev. 2018, 118, 9233.
E. Eustache, P. Tilmant, L. Morgenroth, P. Roussel, G. Patriarche, D. Troadec, N. Rolland, T. Brousse, C. Lethien, Adv. Energy Mater. 2014, 4, 1301612.
V. Augustyn, J. Come, M. A. Lowe, J. W. Kim, P.-L. Taberna, S. H. Tolbert, H. D. Abruña, P. Simon, B. Dunn, Nat. Mater. 2013, 12, 518.
H. Sun, L. Mei, J. Liang, Z. Zhao, C. Lee, H. Fei, M. Ding, J. Lau, M. Li, C. Wang, X. Xu, G. Hao, B. Papandrea, I. Shakir, B. Dunn, Y. Huang, X. Duan, Science 2017, 356, 599.
H.-S. Kim, J. B. Cook, H. Lin, J. S. Ko, S. H. Tolbert, V. Ozolins, B. Dunn, Nat. Mater. 2017, 16, 454.
C. Arico, S. Ouendi, P.-L. Taberna, P. Roussel, P. Simon, C. Lethien, ACS Nano 2019, 13, 5826.
S. Ouendi, C. Arico, F. Blanchard, J.-L. Codron, X. Wallart, P. L. Taberna, P. Roussel, L. Clavier, P. Simon, C. Lethien, Energy Storage Mater. 2019, 16, 581.
D. Gürsoy, F. De Carlo, X. Xiao, C. Jacobsen, J. Synchrotron Radiat. 2014, 21, 1188.
I. Arganda-Carreras, V. Kaynig, C. Rueden, K. W. Eliceiri, J. Schindelin, A. Cardona, H. Sebastian Seung, Bioinformatics 2017, 33, 2424.
P. Virtanen, R. Gommers, T. E. Oliphant, M. Haberland, T. Reddy, D. Cournapeau, E. Burovski, P. Peterson, W. Weckesser, J. Bright, S. J. van der Walt, M. Brett, J. Wilson, K. Jarrod Millman, N. Mayorov, A. R. J. Nelson, E. Jones, R. Kern, E. Larson, C. Carey, İ Polat, Y. Feng, E. W. Moore, J. VanderPlas, D. Laxalde, J. Perktold, R. Cimrman, I. Henriksen, E. A. Quintero, C. R. Harris, A. M. Archibald, A. H. Ribeiro, F. Pedregosa, P. van Mulbregt, SciPy 1.0 Contributors, Nat. Methods 2020, 17, 261.
U. Vogt, M. Lindblom, P. Charalambous, B. Kaulich, T. Wilhein, Opt. Lett. 2006, 31, 1465.
R. Vescovi, M. Du, V. d. Andrade, W. Scullin, D. Gürsoy, C. Jacobsen, J. Synchrotron Radiat. 2018, 25, 1478.
M. Du, Y. S. Nashed, S. Kandel, D. Gürsoy, C. Jacobsen, Sci. Adv. 2020, 6, eaay3700.
W. Van Aarle, W. J. Palenstijn, J. De Beenhouwer, T. Altantzis, S. Bals, K. J. Batenburg, J. Sijbers, Ultramicroscopy 2015, 157, 35.
F. Natterer, The Mathematics of Computerized Tomography, SIAM, Philadelphia, PA, USA 2001.
S. Boyd, N. Parikh, E. Chu, B. Peleato, J. Eckstein, Found. Trends Mach. Learn. 2011, 3, 1.
G. Farnebäck, in Scandinavian Conf. on Image Analysis, Springer 2003, pp. 363-370.
G. Harauz, M. van Heel, Optik (Stuttgart) 1986, 73, 146.
S. V. Koho, G. Tortarolo, M. Castello, T. Deguchi, A. Diaspro, G. Vicidomini, bioRxiv 2019, 535583.
H. Y. Liao, J. Frank, Structure 2010, 18, 768.
M. Holler, M. Guizar-Sicairos, E. H. Tsai, R. Dinapoli, E. Müller, O. Bunk, J. Raabe, G. Aeppli, Nature 2017, 543, 402.
M. Holler, A. Díaz, M. Guizar-Sicairos, P. Karvinen, E. Färm, E. Härkönen, M. Ritala, A. Menzel, J. Raabe, O. Bunk, Sci. Rep. 2014, 4, 3857.
W. S. Cleveland, J. Am. Stat. Assoc. 1979, 74, 829.
D. A. Shapiro, S. Babin, R. S. Celestre, W. Chao, R. P. Conley, P. Denes, B. Enders, P. Enfedaque, S. James, J. M. Joseph, H. Krishnan, S. Marchesini, K. Muriki, K. Nowrouzi, S. R. Oh, H. Padmore, T. Warwick, L. Yang, V. V. Yashchuk, Y.-S. Yu, J. Zhao, Sci. Adv. 2020, 6, eabc4904.