High In-Plane Thermal Conductivity of Aluminum Nitride Thin Films.

AlN thin films anisotropy ratio in-plane thermal conductivity phonon−phonon scattering steady-state thermoreflectance

Journal

ACS nano
ISSN: 1936-086X
Titre abrégé: ACS Nano
Pays: United States
ID NLM: 101313589

Informations de publication

Date de publication:
22 Jun 2021
Historique:
pubmed: 29 4 2021
medline: 29 4 2021
entrez: 28 4 2021
Statut: ppublish

Résumé

High thermal conductivity materials show promise for thermal mitigation and heat removal in devices. However, shrinking the length scales of these materials often leads to significant reductions in thermal conductivities, thus invalidating their applicability to functional devices. In this work, we report on high in-plane thermal conductivities of 3.05, 3.75, and 6 μm thick aluminum nitride (AlN) films measured

Identifiants

DOI: 10.1021/acsnano.0c09915 PMID: 33908771
pubmed: 33908771
doi: 10.1021/acsnano.0c09915
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

9588-9599

Auteurs

Md Shafkat Bin Hoque (MSB)

Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.
ORCID: 0000-0001-7853-9282

Yee Rui Koh (YR)

Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.
ORCID: 0000-0002-7697-8115

Jeffrey L Braun (JL)

Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.

Abdullah Mamun (A)

Department of Electrical Engineering, University of South Carolina, Columbia, South Carolina 29208, United States.
ORCID: 0000-0002-6210-7829

Zeyu Liu (Z)

Department of Aerospace and Mechanical Engineering, University of Notre Dame, Notre Dame, Indiana 46556, United States.

Kenny Huynh (K)

Department of Materials Science and Engineering, University of California, Los Angeles, California 90095, United States.

Michael E Liao (ME)

Department of Materials Science and Engineering, University of California, Los Angeles, California 90095, United States.

Kamal Hussain (K)

Department of Electrical Engineering, University of South Carolina, Columbia, South Carolina 29208, United States.

Zhe Cheng (Z)

George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States.
ORCID: 0000-0001-7827-2979

Eric R Hoglund (ER)

Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.

David H Olson (DH)

Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.

John A Tomko (JA)

Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.

Kiumars Aryana (K)

Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.

Roisul Galib (R)

Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.

John T Gaskins (JT)

Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.

Mirza Mohammad Mahbube Elahi (MMM)

Department of Electrical and Computer Engineering, University of New Mexico, Albuquerque, New Mexico 87131, United States.

Zayd C Leseman (ZC)

Department of Mechanical Engineering, and Interdisciplinary Research Center for Advanced Materials, King Fahd University of Petroleum & Minerals, Dhahran, Eastern Province 31261, Saudi Arabia.

James M Howe (JM)

Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.

Tengfei Luo (T)

Department of Aerospace and Mechanical Engineering, University of Notre Dame, Notre Dame, Indiana 46556, United States.
ORCID: 0000-0003-3940-8786

Samuel Graham (S)

George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States.
School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States.
ORCID: 0000-0002-1299-1636

Mark S Goorsky (MS)

Department of Materials Science and Engineering, University of California, Los Angeles, California 90095, United States.

Asif Khan (A)

Department of Electrical Engineering, University of South Carolina, Columbia, South Carolina 29208, United States.

Patrick E Hopkins (PE)

Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.
Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.
Department of Physics, University of Virginia, Charlottesville, Virginia 22904, United States.
ORCID: 0000-0002-3403-743X

Classifications MeSH