Digital Electrochemistry for On-Chip Heterogeneous Material Integration.
electrochemical actuators
electrochemical depositions
electrochromic displays
heterogeneous integration
indium-gallium-zinc oxide active matrices
Journal
Advanced materials (Deerfield Beach, Fla.)
ISSN: 1521-4095
Titre abrégé: Adv Mater
Pays: Germany
ID NLM: 9885358
Informations de publication
Date de publication:
Jul 2021
Jul 2021
Historique:
revised:
30
03
2021
received:
14
02
2021
pubmed:
25
5
2021
medline:
25
5
2021
entrez:
24
5
2021
Statut:
ppublish
Résumé
Many modern electronic applications rely on functional units arranged in an active-matrix integrated on a single chip. The active-matrix allows numerous identical device pixels to be addressed within a single system. However, next-generation electronics requires heterogeneous integration of dissimilar devices, where sensors, actuators, and display pixels sense and interact with the local environment. Heterogeneous material integration allows the reduction of size, increase of functionality, and enhancement of performance; however, it is challenging since front-end fabrication technologies in microelectronics put extremely high demands on materials, fabrication protocols, and processing environments. To overcome the obstacle in heterogeneous material integration, digital electrochemistry is explored here, which site-selectively carries out electrochemical processes to deposit and address electroactive materials within the pixel array. More specifically, an amorphous indium-gallium-zinc oxide (a-IGZO) thin-film-transistor (TFT) active-matrix is used to address pixels within the matrix and locally control electrochemical reactions for material growth and actuation. The digital electrochemistry procedure is studied in-depth by using polypyrrole (PPy) as a model material. Active-matrix-driven multicolored electrochromic patterns and actuator arrays are fabricated to demonstrate the capabilities of this approach for material integration. The approach can be extended to a broad range of materials and structures, opening up a new path for advanced heterogeneous microsystem integration.
Identifiants
pubmed: 34028906
doi: 10.1002/adma.202101272
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
e2101272Subventions
Organisme : Leibniz Association and the German Research Foundation DFG
Organisme : Gottfried Wilhelm Leibniz Program
ID : 1298/22-1
Organisme : Deutsche Forschungsgemeinschaft
ID : KA5051/1-1
Informations de copyright
© 2021 The Authors. Advanced Materials published by Wiley-VCH GmbH.
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