High Resolution Patterning of an Organic-Inorganic Photoresin for the Fabrication of Platinum Microstructures.
direct lithography
metal printing
nanofabrication
platinum microstructures
printed electronics
two-photon lithography
Journal
Advanced materials (Deerfield Beach, Fla.)
ISSN: 1521-4095
Titre abrégé: Adv Mater
Pays: Germany
ID NLM: 9885358
Informations de publication
Date de publication:
Sep 2021
Sep 2021
Historique:
revised:
09
06
2021
received:
12
03
2021
pubmed:
3
8
2021
medline:
3
8
2021
entrez:
2
8
2021
Statut:
ppublish
Résumé
Platinum (Pt) is an interesting material for many applications due to its high chemical resilience, outstanding catalytic activity, high electrical conductivity, and high melting point. However, microstructuring and especially 3D microstructuring of platinum is a complex process, based on expensive and specialized equipment often suffering from very slow processing speeds. In this work, organic-inorganic photoresins, which can be structured using direct optical lithography as well as two-photon lithography (TPL) with submicrometer resolution and high-throughput is presented. The printed structures are subsequently converted to high-purity platinum using thermal debinding of the binder and reduction of the salt. With this technique, complex 3D structures with a 3D resolution of 300 nm were fabricated. At a layer thickness of 35 nm, the patterns reach a high conductivity of 67% compared to bulk platinum. Microheaters, thermocouple sensors as well as a Lab-on-a-Chip system are presented as exemplary applications. This technology will enable a broad range of application from electronics, sensing and heating elements to 3D photonics and metamaterials.
Identifiants
pubmed: 34337801
doi: 10.1002/adma.202101992
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
e2101992Subventions
Organisme : German Ministry of Education and Research
ID : 03X5527
Organisme : European Union's Horizon 2020 research and innovation programme
ID : 816006
Organisme : Deutsche Forschungsgemeinschaft
Organisme : Germany's Excellence Strategy
ID : EXC-2193/1 - 390951807
Organisme : Research Cluster "Interactive and Programmable Materials
Organisme : Carl Zeiss Foundation
Organisme : European Research Council
Pays : International
Informations de copyright
© 2021 The Authors. Advanced Materials published by Wiley-VCH GmbH.
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