One-Step Synthesis of NbSe

contact resistance ohmic contact one-step synthesis substitution doping van der Waals heterostructures

Journal

ACS nano
ISSN: 1936-086X
Titre abrégé: ACS Nano
Pays: United States
ID NLM: 101313589

Informations de publication

Date de publication:
24 Aug 2021
Historique:
pubmed: 6 8 2021
medline: 6 8 2021
entrez: 5 8 2021
Statut: ppublish

Résumé

van der Waals heterostructures (vdWHs) of metallic (m-) and semiconducting (s-) transition-metal dichalcogenides (TMDs) exhibit an ideal metal/semiconductor (M/S) contact in a field-effect transistor. However, in the current two-step chemical vapor deposition process, the synthesis of m-TMD on pregrown s-TMD contaminates the van der Waals (vdW) interface and hinders the doping of s-TMD. Here, NbSe

Identifiants

pubmed: 34350752
doi: 10.1021/acsnano.1c02038
doi:

Types de publication

Journal Article

Langues

eng

Sous-ensembles de citation

IM

Pagination

13031-13040

Auteurs

Van Tu Vu (VT)

Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
Center for Integrated Nanostructure Physics, Institute for Basic Science, Sungkyunkwan University, Suwon 16419, Republic of Korea.

Thi Thanh Huong Vu (TTH)

Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.

Thanh Luan Phan (TL)

Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.

Won Tae Kang (WT)

Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.

Young Rae Kim (YR)

Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.

Minh Dao Tran (MD)

Department of Energy Science, Sungkyunkwan University, Suwon 16419, Republic of Korea.
Center for Integrated Nanostructure Physics, Institute for Basic Science, Sungkyunkwan University, Suwon 16419, Republic of Korea.

Huong Thi Thanh Nguyen (HTT)

Department of Energy Science, Sungkyunkwan University, Suwon 16419, Republic of Korea.
Center for Integrated Nanostructure Physics, Institute for Basic Science, Sungkyunkwan University, Suwon 16419, Republic of Korea.

Young Hee Lee (YH)

Department of Energy Science, Sungkyunkwan University, Suwon 16419, Republic of Korea.
Center for Integrated Nanostructure Physics, Institute for Basic Science, Sungkyunkwan University, Suwon 16419, Republic of Korea.

Woo Jong Yu (WJ)

Department of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.

Classifications MeSH