Further Increasing the Accuracy of Characterization of a Thin Dielectric or Semiconductor Film on a Substrate from Its Interference Transmittance Spectrum.
dielectric film
envelope method
increased characterization accuracy
semiconductor film
thin film
transmittance spectrum
Journal
Materials (Basel, Switzerland)
ISSN: 1996-1944
Titre abrégé: Materials (Basel)
Pays: Switzerland
ID NLM: 101555929
Informations de publication
Date de publication:
19 Aug 2021
19 Aug 2021
Historique:
received:
29
06
2021
revised:
12
08
2021
accepted:
17
08
2021
entrez:
27
8
2021
pubmed:
28
8
2021
medline:
28
8
2021
Statut:
epublish
Résumé
Three means are investigated for further increasing the accuracy of the characterization of a thin film on a substrate, from the transmittance spectrum
Identifiants
pubmed: 34443203
pii: ma14164681
doi: 10.3390/ma14164681
pmc: PMC8399147
pii:
doi:
Types de publication
Journal Article
Langues
eng
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