Off-axis multilayer zone plate with 16 nm × 28 nm focus for high-resolution X-ray beam induced current imaging.
X-ray beam induced current
X-ray imaging
X-ray optic
XBIC mapping
multilayer zone plates
Journal
Journal of synchrotron radiation
ISSN: 1600-5775
Titre abrégé: J Synchrotron Radiat
Pays: United States
ID NLM: 9888878
Informations de publication
Date de publication:
01 Sep 2021
01 Sep 2021
Historique:
received:
26
02
2021
accepted:
14
06
2021
entrez:
3
9
2021
pubmed:
4
9
2021
medline:
4
9
2021
Statut:
ppublish
Résumé
Using multilayer zone plates (MZPs) as two-dimensional optics, focal spot sizes of less than 10 nm can be achieved, as we show here with a focus of 8.4 nm × 9.6 nm, but the need for order-sorting apertures prohibits practical working distances. To overcome this issue, here an off-axis illumination of a circular MZP is introduced to trade off between working distance and focal spot size. By this, the working distance between order-sorting aperture and sample can be more than doubled. Exploiting a 2D focus of 16 nm × 28 nm, real-space 2D mapping of local electric fields and charge carrier recombination using X-ray beam induced current in a single InP nanowire is demonstrated. Simulations show that a dedicated off-axis MZP can reach sub-10 nm focusing combined with reasonable working distances and low background, which could be used for in operando imaging of composition, carrier collection and strain in nanostructured devices.
Identifiants
pubmed: 34475304
pii: S1600577521006159
doi: 10.1107/S1600577521006159
pmc: PMC8415331
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
1573-1582Subventions
Organisme : Röntgen-Ångström Cluster
ID : 2015-06125
Organisme : Deutsche Forschungsgemeinschaft
ID : SFB 755
Organisme : Bundesministerium für Bildung und Forschung
ID : 05K19MG2
Organisme : H2020 Marie Skłodowska-Curie Actions
ID : INCA 600398
Organisme : H2020 European Research Council
ID : 801847
Informations de copyright
open access.
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