Optimization of imaging conditions for composition determination by annular dark field STEM.
Composition determination
Four-dimensional STEM
Image simulation
Quantitative STEM
Journal
Ultramicroscopy
ISSN: 1879-2723
Titre abrégé: Ultramicroscopy
Pays: Netherlands
ID NLM: 7513702
Informations de publication
Date de publication:
Nov 2021
Nov 2021
Historique:
received:
11
06
2021
revised:
15
08
2021
accepted:
23
08
2021
pubmed:
8
10
2021
medline:
8
10
2021
entrez:
7
10
2021
Statut:
ppublish
Résumé
Quantitative scanning transmission electron microscopy (STEM) allows composition determination for nanomaterials at an atomic scale. To improve the accuracy of the results obtained, optimized imaging parameters should be chosen for annular dark field imaging. In a simulation study, we investigate the influence of imaging parameters on the accuracy of the composition determination with the example of ternary III-V semiconductors. It is shown that inner and outer detector angles and semi-convergence angle can be optimized, also in dependence on specimen thickness. Both, a minimum sampling of the image and a minimum electron dose are required. These findings are applied experimentally by using a fast pixelated detector to allow free choice of detector angles.
Identifiants
pubmed: 34619567
pii: S0304-3991(21)00167-4
doi: 10.1016/j.ultramic.2021.113387
pii:
doi:
Types de publication
Journal Article
Langues
eng
Sous-ensembles de citation
IM
Pagination
113387Informations de copyright
Copyright © 2021 Elsevier B.V. All rights reserved.